Low Pressure Chemical Vapor Deposition of Aluminum-Doped Zinc Oxide for Transparent Conducting Electrodes

[1]  Jianhua Hu,et al.  Textured aluminum‐doped zinc oxide thin films from atmospheric pressure chemical‐vapor deposition , 1992 .

[2]  H. Ohta,et al.  Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors , 2004, Nature.

[3]  Yi-Cheng Lin,et al.  A study on the wet etching behavior of AZO (ZnO:Al) transparent conducting film , 2008 .

[4]  Alberto Piqué,et al.  Electrical, optical, and structural properties of indium–tin–oxide thin films for organic light-emitting devices , 1999 .

[5]  E. Burstein.  Anomalous Optical Absorption Limit in InSb , 1954 .

[6]  J. Myoung,et al.  Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition , 2010 .

[7]  W. Maeng,et al.  Flat band voltage (VFB) modulation by controlling compositional depth profile in La2O3/HfO2 nanolaminate gate oxide , 2010 .

[8]  F. Yakuphanoglu,et al.  The effects of Al doping on the optical constants of ZnO thin films prepared by spray pyrolysis method , 2008 .

[9]  D. Bäuerle,et al.  Deposition, characterization and biological application of epitaxial Li:ZnO/Al:ZnO double-layers , 2009 .

[10]  N. Emanetoglu,et al.  Ta/Au ohmic contacts to n-type ZnO , 2003 .

[11]  Mineo Hiramatsu,et al.  Transparent conducting ZnO thin films prepared by XeCl excimer laser ablation , 1998 .

[12]  C. Ballif,et al.  Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films , 2007 .

[13]  R. M. Mehra,et al.  Doping mechanism in aluminum doped zinc oxide films , 2004 .

[14]  Fangfang Xu,et al.  Highly Surface-Textured ZnO:Al Films Fabricated by Controlling the Nucleation and Growth Separately for Solar Cell Applications , 2010 .

[15]  Ilgu Yun,et al.  Fabrication of rough Al doped ZnO films deposited by low pressure chemical vapor deposition for high efficiency thin film solar cells , 2010 .

[16]  Shui-Tong Lee,et al.  Aluminum-doped zinc oxide films as transparent conductive electrode for organic light-emitting devices , 2003 .

[17]  J. Sun,et al.  Effects of keV electron irradiation on optical generation of hole traps in thermal oxide on silicon , 1984 .

[18]  H. Nakashima,et al.  Electrical and Structural Properties of TaN Gate Electrodes Fabricated by Wet Etching Using NH4OH/H2O2 Solution and Hf Metal Hard Mask , 2007 .

[19]  C. Ballif,et al.  Polycrystalline ZnO: B grown by LPCVD as TCO for thin film silicon solar cells , 2010 .

[20]  E. Choi,et al.  High work function of Al-doped zinc-oxide thin films as transparent conductive anodes in organic light-emitting devices , 2006 .

[21]  J. Wager,et al.  Transparent Electronics , 2003, Science.

[22]  T. Miyata,et al.  Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering , 1998 .

[23]  S. Rhee,et al.  Deposition of Al-doped ZnO thin-films with radio frequency magnetron sputtering for a source/drain electrode for pentacene thin-film transistor , 2009 .

[24]  Changjung Kim,et al.  Amorphous gallium indium zinc oxide thin film transistors: Sensitive to oxygen molecules , 2007 .

[25]  L. K. Malhotra,et al.  Electrical, optical and annealing characteristics of ZnO:Al films prepared by spray pyrolysis☆ , 1991 .

[26]  H. Hahn,et al.  Electrical resistivity of nanocrystalline Al-doped zinc oxide films as a function of Al content and the degree of its segregation at the grain boundaries , 2010 .

[27]  J. Horwitz,et al.  Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices , 2000 .

[28]  David Cahen,et al.  Electron Energetics at Surfaces and Interfaces: Concepts and Experiments , 2003 .

[29]  S. Chua,et al.  Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition , 2005 .