论文信息 - Hydrogen passivation of PolySilicon MOSFET's from a plasma Nitride source - 字舞流文

Hydrogen passivation of PolySilicon MOSFET's from a plasma Nitride source

P. Chatterjee | T. Bonifield | M. Elahy | W. Richardson | R. Womack | S. Banerjee | G. Pollack | A. Shah | S. Malhi | H. Shichijo