Input Impedance Computation of Cylindrical Stator Ultrasonic Motor

The finite element analysis(FEA)model of cylindrical stator ultrasonic motor(CSUM)was established in this paper.The computation method of input impedance of CSUM was presented.In the impedance analysis of the cylindrical stator linear ultrasonic motor developed by us,the frequency range was from 10 kHz to 40 kHz.The stator's character of impedence was also surveyed by using impedence characteristic analysis instrument.The experimental results proved the theory analysis.