论文信息 - Fabrication-tolerant optical filters for dense integration on a micron-scale SOI platform

Fabrication-tolerant optical filters for dense integration on a micron-scale SOI platform

We present the first characterization results of some cascaded interleavers that we have recently fabricated on 4 μm thick Silicon on Insulator (SOI) wafers. The filters are based on strip waveguides, micron-scale bends and compact MMIs, all components with low loss and high tolerance to fabrication errors, due to the high mode confinement in the silicon region. A thorough comparison of the found results with the theoretical model will be presented, taking into account fabrication limitations. The fabricated filters will be used in the optical RAM circuits of the RAMPLAS project funded by the European Commission.

[1] Timo Aalto,et al. Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform. , 2013, Optics express.

[2] Yasuhiko Arakawa,et al. Si Photonic Wire Waveguide Devices , 2006 .

[3] Shizhong Xie,et al. Silicon-on-insulator narrow-passband filter based on cascaded MZIs incorporating enhanced FSR for downconverting analog photonic links. , 2013, Optics express.

[4] Jeffrey Bokor,et al. Fabrication of Sub-10-nm Silicon Nanowire Arrays by Size Reduction Lithography , 2003 .

[5] Timo Aalto,et al. Deeply etched MMI-based components on 4 μm thick SOI for SOA-based optical RAM cell circuits , 2013, Photonics West - Optoelectronic Materials and Devices.

[6] C.G.H. Roeloffzen,et al. Tunable passband flattened 1-from-16 binary-tree structured add-after-drop multiplexer using SiON waveguide technology , 2000, IEEE Photonics Technology Letters.