Si CMOS process-compatible guided-wave optical interconnects

We report the formation of polyimide-based H-tree waveguides for a multi-GBit/sec optical clock signal distribution in a Si CMOS process compatible environment. Such a clock distribution system is to replace the existing electronic counterpart associated with high-speed supercomputers such as Cray T-90 machine. A waveguide propagation loss of 0.21 dB/cm at 850 nm was experimentally confirmed for the 1-to-48 waveguide fanout device. The planarization requirement of the optical interconnection layer among many electrical interconnection layers makes the employment of tilted grating a choice of desire. Theoretical calculation predicts the 1-to-1 free-space to waveguide coupling with an efficiency as high as 95 percent. Currently, a coupling efficiency of 35 percent was experimentally confirmed due to the limited index difference between guiding and cladding layers. Further experiments aimed at structuring a larger guiding/cladding layer index differences are under investigation. To effectively couple an optical signal into the waveguide through the tilted grating coupler, the accuracy of the wavelength employed is pivotal. This makes the usage of the vertical cavity surface-emitting lasers (VCSELs) and VCSEL arrays the best choice when compared with edge-emitting lasers. Modulation bandwidth as high as 6 GHz was demonstrated at 850 nm. Such a wavelength is compatible with Si-based photodetectors.

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