Internet of things (IoT); internet of everything (IoE); tactile internet; 5G – A (not so evanescent) unifying vision empowered by EH-MEMS (energy harvesting MEMS) and RF-MEMS (radio frequency MEMS)

Abstract This work aims to build inclusive vision of the Internet of Things (IoT), Internet of Everything (IoE), Tactile Internet and 5G, leveraging on MEMS technology, with focus on Energy Harvesters (EH-MEMS) and Radio Frequency passives (RF-MEMS). The IoT is described, stressing the pervasivity of sensing/actuating functions. High-level performances 5G will have to score are reported. Unifying vision of the mentioned paradigms is then built. The IoT evolves into the IoE by overtaking the concept of thing. Further step to Tactile Internet requires significant reduction in latency, it being enabled by 5G. The discussion then moves closer to the hardware components level. Sets of specifications driven by IoT and 5G applications are derived. Concerning the former, the attention is concentrated on typical power requirements imposed by remote wireless sensing nodes. Regarding the latter, a set of reference specifications RF passives will have to meet in order to enable 5G is developed. Once quantitative targets are set, a brief state of the art of EH-MEMS and RF-MEMS solutions is developed, targeting the IoT and 5G, respectively. In both scenarios, it will be demonstrated that MEMS are able to address the requirements previously listed, concerning EH from various sources and RF passive components. In conclusion, the frame of reference depicted in this work outlines a relevant potential borne by EH-MEMS and RF-MEMS solutions within the unified scenario of IoT, IoE, Tactile Internet and 5G, making the forecast of future relentless growth of MEMS-based devices, more plausible and likely to take place.

[1]  Deog-Kyoon Jeong,et al.  A 0.4-to-1 V Voltage Scalable $\Delta \Sigma $ ADC With Two-Step Hybrid Integrator for IoT Sensor Applications in 65-nm LP CMOS , 2017, IEEE Transactions on Circuits and Systems II: Express Briefs.

[2]  Minghui Zhang,et al.  Architecture of Internet of Things and Its Key Technology Integration Based-On RFID , 2012, 2012 Fifth International Symposium on Computational Intelligence and Design.

[3]  Raafat R. Mansour,et al.  The Sky's the Limit: A Switchable RF-MEMS Filter Design for Wireless Avionics Intracommunication , 2017, IEEE Microwave Magazine.

[4]  Mohsen Guizani,et al.  Emerging Trends, Issues, and Challenges in Big Data and Its Implementation toward Future Smart Cities , 2017, IEEE Commun. Mag..

[5]  Antonios Bazigos,et al.  RF MEMS power sensors for ultra-low power wake-up circuit applications , 2013, 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC).

[6]  H. Kulah,et al.  Thin film thermoelectric energy harvesters for MEMS micropower generation , 2010, 2010 International Conference on Energy Aware Computing.

[7]  Jacopo Iannacci,et al.  Up-scaled macro-device implementation of a MEMS wideband vibration piezoelectric energy harvester design concept , 2016 .

[8]  Jan M. Rabaey,et al.  Energy Scavenging for Wireless Sensor Networks: with Special Focus on Vibrations , 2012 .

[9]  Ulrich Schmid,et al.  A novel toggle-type MEMS vibration energy harvester for Internet of Things applications , 2016, 2016 IEEE SENSORS.

[10]  Matteo Petracca,et al.  AMBER: An advanced gateway solution to support heterogeneous IoT technologies , 2016, 2016 24th International Conference on Software, Telecommunications and Computer Networks (SoftCOM).

[11]  Eric M. Yeatman,et al.  Broadband rotational energy harvesting using bistable mechanism and frequency up-conversion , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[12]  Xiaohao Wang,et al.  Review of MEMS Electromagnetic Vibration Energy Harvester , 2017, Journal of Microelectromechanical Systems.

[13]  Walid Balid,et al.  On the development of self-powered iot sensor for real-time traffic monitoring in smart cities , 2017, 2017 IEEE SENSORS.

[14]  Yi Wang,et al.  Thermal matching designed CMOS mems-based thermoelectric generator for naturally cooling condition , 2013, 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).

[15]  Anne Roc'h,et al.  Wireless Receiver Architectures Towards 5G: Where Are We? , 2017, IEEE Circuits and Systems Magazine.

[16]  Young Lee,et al.  Cloud-based battery condition monitoring platform for large-scale lithium-ion battery energy storage systems using internet-of-things (IoT) , 2017, 2017 IEEE Energy Conversion Congress and Exposition (ECCE).

[17]  Emre Tan Topal,et al.  A Vibration-Based Electromagnetic Energy Harvester Using Mechanical Frequency Up-Conversion Method , 2011, IEEE Sensors Journal.

[18]  Ulrich Schmid,et al.  A novel MEMS-based piezoelectric multi-modal vibration energy harvester concept to power autonomous remote sensing nodes for Internet of Things (IoT) applications , 2015, 2015 IEEE SENSORS.

[19]  Serbulent Tozlu,et al.  Wi-Fi enabled sensors for internet of things: A practical approach , 2012, IEEE Communications Magazine.

[20]  H. Goldsmid,et al.  Introduction to Thermoelectricity , 2016 .

[21]  Joseph A. Paradiso,et al.  Parasitic power harvesting in shoes , 1998, Digest of Papers. Second International Symposium on Wearable Computers (Cat. No.98EX215).

[22]  Xiaoping Liao,et al.  A state-converting inline RF MEMS power sensor using GaAs MMIC technology , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[23]  Yulong Zhang,et al.  Wideband MEMS electrostatic energy harvester with dual resonant structure , 2016, 2016 IEEE SENSORS.

[24]  Ryan Bahr,et al.  A Novel Solar and Electromagnetic Energy Harvesting System With a 3-D Printed Package for Energy Efficient Internet-of-Things Wireless Sensors , 2017, IEEE Transactions on Microwave Theory and Techniques.

[25]  Apostolos Georgiadis,et al.  Conformal Hybrid Solar and Electromagnetic (EM) Energy Harvesting Rectenna , 2013, IEEE Transactions on Circuits and Systems I: Regular Papers.

[26]  Van-Giang Nguyen,et al.  SDN and Virtualization-Based LTE Mobile Network Architectures: A Comprehensive Survey , 2016, Wirel. Pers. Commun..

[27]  Jung-Mu Kim,et al.  A 50-110 GHz ohmic contact RF MEMS silicon switch with high isolation , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[28]  E. Halvorsen.  Fundamental issues in nonlinear wideband-vibration energy harvesting. , 2012, Physical review. E, Statistical, nonlinear, and soft matter physics.

[29]  Hua-Jun Hong,et al.  Supporting Internet-of-Things Analytics in a Fog Computing Platform , 2017, 2017 IEEE International Conference on Cloud Computing Technology and Science (CloudCom).

[30]  Jingtong Hu,et al.  Multi-source in-door energy harvesting for non-volatile processors , 2016, 2016 IEEE International Symposium on Circuits and Systems (ISCAS).

[31]  J. Iannacci,et al.  Study of an active thermal recovery mechanism for an electrostatically actuated RF-MEMS switch , 2012, 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.

[32]  Goutam Chattopadhyay,et al.  A 500–750 GHz RF MEMS Waveguide Switch , 2017, IEEE Transactions on Terahertz Science and Technology.

[33]  Ulrich Schmid,et al.  Investigation of the Performance of Thermoelectric Energy Harvesters Under Real Flight Conditions , 2013, Journal of Electronic Materials.

[34]  Himanshi,et al.  ICT and internet of things for creating smart learning environment for students at education institutes in India , 2016, 2016 6th International Conference - Cloud System and Big Data Engineering (Confluence).

[35]  Andrei Osinsky,et al.  Pyroelectric properties of AlN , 2000 .

[36]  T. Fujita,et al.  SOI-MEMS Sensor for Multi-Environmental Sensing-System , 2007, 2007 Fourth International Conference on Networked Sensing Systems.

[37]  Chengkuo Lee,et al.  An In-Plane Approximated Nonlinear MEMS Electromagnetic Energy Harvester , 2014, Journal of Microelectromechanical Systems.

[38]  Lei Liu,et al.  Network Densification in 5G: From the Short-Range Communications Perspective , 2016, IEEE Communications Magazine.

[39]  Muhammad Mustafa Hussain,et al.  A CMOS-compatible large-scale monolithic integration of heterogeneous multi-sensors on flexible silicon for IoT applications , 2016, 2016 IEEE International Electron Devices Meeting (IEDM).

[40]  Regan Zane,et al.  Low-Power Far-Field Wireless Powering for Wireless Sensors , 2013, Proceedings of the IEEE.

[41]  Yuandong Gu,et al.  AlN wideband energy harvesters with wafer-level vacuum packaging utilizing three-wafer bonding , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[42]  A. Hajati,et al.  Design and fabrication of a nonlinear resonator for ultra wide-bandwidth energy harvesting applications , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[43]  Chia-han Lee,et al.  Distributed computing in IoT: System-on-a-chip for smart cameras as an example , 2015, The 20th Asia and South Pacific Design Automation Conference.

[44]  Y. Wang,et al.  Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[45]  Pranay Podder,et al.  Magnetic Tuning of Nonlinear MEMS Electromagnetic Vibration Energy Harvester , 2017, Journal of Microelectromechanical Systems.

[46]  Jacopo Iannacci.  RF-MEMS Technology for High-Performance Passives: The challenge of 5G mobile applications , 2017 .

[47]  Ulrich Schmid,et al.  Simulation and laser vibrometry characterization of piezoelectric AlN thin films , 2008 .

[48]  Salem Saadon,et al.  From ambient vibrations to green energy source: MEMS piezoelectric energy harvester for low frequency application , 2015, 2015 IEEE Student Symposium in Biomedical Engineering & Sciences (ISSBES).

[49]  Pierre Blondy,et al.  A compact DC-10 GHz SP7T RF MEMS switch , 2014, 2014 IEEE MTT-S International Microwave Symposium (IMS2014).

[50]  Sergey Andreev,et al.  Assisted Handover Based on Device-to-Device Communications in 3GPP LTE Systems , 2015, 2015 IEEE Globecom Workshops (GC Wkshps).

[51]  Sven Mattisson.  Overview of 5G requirements and future wireless networks , 2017, ESSCIRC 2017 - 43rd IEEE European Solid State Circuits Conference.

[52]  Alexandru Takacs,et al.  Microwave Power Harvesting for Satellite Health Monitoring , 2014, IEEE Transactions on Microwave Theory and Techniques.

[53]  J. Iannacci,et al.  RF-MEMS Technology for 5G: Series and Shunt Attenuator Modules Demonstrated up to 110 GHz , 2016, IEEE Electron Device Letters.

[54]  Pasqualina M. Sarro,et al.  Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes , 2014 .

[55]  AKHIL GUPTA,et al.  A Survey of 5G Network: Architecture and Emerging Technologies , 2015, IEEE Access.

[56]  Matthias Wietstruck,et al.  An ultra-low phase noise 3.37 –3.58 GHz MEMS varactor based VCO with continuous frequency tuning , 2016, 2016 IEEE MTT-S International Microwave Symposium (IMS).

[57]  Ahmed I. Nasr,et al.  Millimeter-wave wireless backhauling for 5G small cells: Scalability of mesh over star topologies , 2017, 2017 IEEE 18th International Symposium on A World of Wireless, Mobile and Multimedia Networks (WoWMoM).

[58]  J. Iannacci,et al.  RF-MEMS Technology for Future Mobile and High-Frequency Applications: Reconfigurable 8-Bit Power Attenuator Tested up to 110 GHz , 2016, IEEE Electron Device Letters.

[59]  Jacopo Iannacci,et al.  RF-MEMS for future mobile applications: experimental verification of a reconfigurable 8-bit power attenuator up to 110 GHz , 2017 .

[60]  Yuxi Liu,et al.  Key Technologies and Applications of Internet of Things , 2012, 2012 Fifth International Conference on Intelligent Computation Technology and Automation.

[61]  Yasir Mehmood,et al.  Internet-of-Things-Based Smart Cities: Recent Advances and Challenges , 2017, IEEE Communications Magazine.

[62]  Francis Enejo Idachaba,et al.  5G networks: Open network architecture and densification strategies for beyond 1000x network capacity increase , 2016, 2016 Future Technologies Conference (FTC).

[63]  Gaudenzio Meneghesso,et al.  An active heat-based restoring mechanism for improving the reliability of RF-MEMS switches , 2011, Microelectron. Reliab..

[64]  J. Oberhammer,et al.  500-750 GHz submillimeter-wave MEMS waveguide switch , 2016, 2016 IEEE MTT-S International Microwave Symposium (IMS).

[65]  K.R. Santhi,et al.  Goals of true broad band's wireless next wave (4G-5G) , 2003, 2003 IEEE 58th Vehicular Technology Conference. VTC 2003-Fall (IEEE Cat. No.03CH37484).

[66]  F. Y. Kuo,et al.  Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures , 2017, IEEE Journal of the Electron Devices Society.

[67]  M. Kishi,et al.  Micro thermoelectric modules and their application to wristwatches as an energy source , 1999, Eighteenth International Conference on Thermoelectrics. Proceedings, ICT'99 (Cat. No.99TH8407).

[68]  Suhwan Kim,et al.  Harvesting circuits for miniaturized photovoltaic cells , 2011, 2011 IEEE International Symposium of Circuits and Systems (ISCAS).

[69]  Julie A. McCann,et al.  Optimal processing node discovery algorithm for distributed computing in IoT , 2015, 2015 5th International Conference on the Internet of Things (IOT).

[70]  J. Iannacci,et al.  A general purpose reconfigurable MEMS-based attenuator for Radio Frequency and microwave applications , 2009, IEEE EUROCON 2009.

[71]  Alexandru Takacs,et al.  Power source evaluation of a wireless power transfer system , 2014, 2014 IEEE Wireless Power Transfer Conference.

[72]  Jungwon Lee,et al.  Advanced interference management for 5G cellular networks , 2014, IEEE Communications Magazine.

[73]  Gaudenzio Meneghesso,et al.  Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism , 2010, Microelectron. Reliab..

[74]  Stanimir Valtchev,et al.  Tuning techniques for kinetic MEMS energy harvesters , 2011, 2011 IEEE 33rd International Telecommunications Energy Conference (INTELEC).

[75]  Goutam Chattopadhyay,et al.  Submillimeter-Wave 3.3-bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide , 2016, IEEE Transactions on Terahertz Science and Technology.

[76]  E. Baburaj,et al.  Efficient approach to maximise WSN lifetime using weighted optimum storage-node placement, efficient and energetic wireless recharging, efficient rule-based node rotation and critical-state-data-passing methods , 2017, IET Networks.

[77]  Salar Chamanian,et al.  Wideband capacitive energy harvester based on mechanical frequency-up conversion , 2012, 2012 IEEE Sensors Applications Symposium Proceedings.

[78]  Chin-Teng Lin,et al.  Edge of Things: The Big Picture on the Integration of Edge, IoT and the Cloud in a Distributed Computing Environment , 2018, IEEE Access.

[79]  Ganesh Kumar Venayagamoorthy,et al.  Internet of Things (IoT) sensors for smart home electric energy usage management , 2016, 2016 IEEE International Conference on Information and Automation for Sustainability (ICIAfS).

[80]  S. W. Lye,et al.  Sandwich structured electrostatic/electrets parallel-plate power generator for low acceleration and low frequency vibration energy harvesting , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[81]  Jacopo Iannacci,et al.  RF-MEMS: an enabling technology for modern wireless systems bearing a market potential still not fully displayed , 2015 .

[82]  Daniel J. Inman,et al.  Piezoelectric Energy Harvesting , 2011 .

[83]  Yu Jia,et al.  A Hybrid Vibration Powered Microelectromechanical Strain Gauge , 2016, IEEE Sensors Journal.

[84]  C.T.-C. Nguyen,et al.  Transceiver front-end architectures using vibrating micromechanical signal processors , 2001, 2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. Digest of Papers (IEEE Cat. No.01EX496).

[85]  Ozgur B. Akan,et al.  Internet of Hybrid Energy Harvesting Things , 2018, IEEE Internet of Things Journal.

[86]  Alison Burdett,et al.  Ultra-Low-Power Wireless Systems: Energy-Efficient Radios for the Internet of Things , 2015, IEEE Solid-State Circuits Magazine.

[87]  Luca Benini,et al.  An Event-Driven Ultra-Low-Power Smart Visual Sensor , 2016, IEEE Sensors Journal.

[88]  Matthew S. Reynolds,et al.  BLE-Backscatter: Ultralow-Power IoT Nodes Compatible With Bluetooth 4.0 Low Energy (BLE) Smartphones and Tablets , 2017, IEEE Transactions on Microwave Theory and Techniques.

[89]  Taoka Hidekazu,et al.  Scenarios for 5G mobile and wireless communications: the vision of the METIS project , 2014, IEEE Communications Magazine.

[90]  Ulrich Schmid,et al.  The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification , 2016 .

[91]  Jongbaeg Kim,et al.  Piezoelectric and electromagnetic hybrid energy harvester using two cantilevers for frequency up-conversion , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[92]  U. Prechtel,et al.  Design and characterization of a simplified planar 16×8 RF MEMS switch matrix for a GEO-stationary data relay , 2012, 2012 7th European Microwave Integrated Circuit Conference.

[93]  C. Jany,et al.  Towards fully integrated 28nm UTBB FD-SOI IoT node: The sub-50μW RF receiver , 2016, 2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).

[94]  Massimo Gottardi,et al.  A 30 µW 30 fps 110 × 110 Pixels Vision Sensor Embedding Local Binary Patterns , 2015, IEEE Journal of Solid-State Circuits.

[95]  Wai-Kong Lee,et al.  Multi-source energy harvesting and storage for floating wireless sensor network nodes , 2016, 2016 IEEE Industrial Electronics and Applications Conference (IEACon).

[96]  Erik G. Larsson,et al.  Massive MIMO for next generation wireless systems , 2013, IEEE Communications Magazine.

[97]  F. Ayazi,et al.  Multi-axis AlN-on-Silicon vibration energy harvester with integrated frequency-upconverting transducers , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[98]  Mustafa Kocakulak,et al.  An overview of Wireless Sensor Networks towards internet of things , 2017, 2017 IEEE 7th Annual Computing and Communication Workshop and Conference (CCWC).

[99]  Jacopo Iannacci,et al.  Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level , 2015, Displays.

[100]  Halim Yanikomeroglu,et al.  Device-to-device communication in 5G cellular networks: challenges, solutions, and future directions , 2014, IEEE Communications Magazine.

[101]  A. Hmood,et al.  Fabrication and Characterization of Pb1-xYbxSe0.2Te0.8 Based Alloy Thin Films Thermoelectric Generators Grown Using Thermal Evaporation Method , 2013 .

[102]  John S. Derov,et al.  Large Pyroelectric Response from Reactively Sputtered Aluminum Nitride Thin Films , 2005 .

[103]  T. Galchev,et al.  A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations , 2012, Journal of Microelectromechanical Systems.

[104]  O. Wunnicke,et al.  Small, low-ohmic RF MEMS switches with thin-film package , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[105]  María Teresa Penella-López,et al.  Powering Autonomous Sensors: An Integral Approach with Focus on Solar and RF Energy Harvesting , 2011 .

[106]  Roy Paily,et al.  Efficient Solar Power Management System for Self-Powered IoT Node , 2017, IEEE Transactions on Circuits and Systems I: Regular Papers.

[107]  Kjetil Folgero,et al.  A six bit, 6–18 GHz, RF-MEMS impedance tuner for 50 Ω systems , 2009, 2009 European Microwave Conference (EuMC).

[108]  Peter Woias,et al.  NONLINEAR EFFECTS IN PIEZOELECTRIC VIBRATION HARVESTERS WITH HIGH COUPLING FACTORS , 2009 .

[109]  Yi Wang,et al.  Significant performance improvement for micro-thermoelectric energy generator based on system analysis , 2015 .

[110]  Carol Livermore,et al.  Scalable, MEMS-enabled, vibrational tactile actuators for high resolution tactile displays , 2014 .

[111]  Jacopo Iannacci.  RF-MEMS technology: An enabling solution in the transition from 4G-LTE to 5G mobile applications , 2017, 2017 IEEE SENSORS.

[112]  Hyunseung Choo,et al.  Internet of Everything: A Large-Scale Autonomic IoT Gateway , 2017, IEEE Transactions on Multi-Scale Computing Systems.

[113]  Daniel Minoli,et al.  Wireless Sensor Networks: Technology, Protocols, and Applications , 2007 .

[114]  M Maja Vidojkovic.  Configurable circuits and their impact on multi-standard RF front-end architectures , 2011 .

[115]  Lei Wang,et al.  A Power-Efficient Capacitive Read-Out Circuit With Parasitic-Cancellation for MEMS Cochlea Sensors , 2016, IEEE Transactions on Biomedical Circuits and Systems.

[116]  Laleh Najafizadeh,et al.  Reference circuits for emerging applications-from extreme environment electronics to internet of things , 2017, 2017 IEEE 60th International Midwest Symposium on Circuits and Systems (MWSCAS).

[117]  K. Najafi,et al.  A micro thermoelectric energy scavenger for a hybrid insect , 2008, 2008 IEEE Sensors.

[118]  Julien Penders,et al.  Energy Harvesting for Autonomous Wireless Sensor Networks , 2010, IEEE Solid-State Circuits Magazine.

[119]  Mykhailo Klymash,et al.  Flexible backhaul architecture for densely deployed 5G small cells based on OWTDMA network , 2016, 2016 Third International Scientific-Practical Conference Problems of Infocommunications Science and Technology (PIC S&T).

[120]  Takahiro Hanyu.  Standby-power-free integrated circuits using MTJ-based VLSI computing for IoT applications , 2017, 2017 Fifth Berkeley Symposium on Energy Efficient Electronic Systems & Steep Transistors Workshop (E3S).

[121]  Josef Vollmer,et al.  Miniaturization of vibration energy generators for energy harvesting systems , 2015, 2015 16th International Conference on Research and Education in Mechatronics (REM).

[122]  Ozgur B. Akan,et al.  Electric-Field Energy Harvesting From Lighting Elements for Battery-Less Internet of Things , 2017, IEEE Access.

[123]  Carol Livermore,et al.  A pivot-hinged, multilayer SU-8 micro motion amplifier assembled by a self-aligned approach , 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).

[124]  J. R. Long,et al.  An Autonomous Wireless Sensor Node Incorporating a Solar Cell Antenna for Energy Harvesting , 2011, IEEE Transactions on Microwave Theory and Techniques.

[125]  G. J. Snyder,et al.  Small Thermoelectric Generators , 2008 .

[126]  David Blaauw,et al.  Hardware Designs for Security in Ultra-Low-Power IoT Systems: An Overview and Survey , 2017, IEEE Micro.

[127]  Vinoth Babu Kumaravelu,et al.  Event driven distributed cluster computing technique for internet of things system , 2017, 2017 International conference on Microelectronic Devices, Circuits and Systems (ICMDCS).

[128]  Pierre Blondy,et al.  High Q zero level packaged RF-MEMS switched capacitor arrays , 2016, 2016 46th European Microwave Conference (EuMC).

[129]  A. Joffé,et al.  The Revival of Thermoelectricity , 1958 .

[130]  Luca Benini,et al.  Energy-efficient design of an always-on smart visual trigger , 2016, 2016 IEEE International Smart Cities Conference (ISC2).