论文信息 - Enlargement of step-free SiC surfaces by homoepitaxial web growth of thin SiC cantilevers - 字舞流文

Enlargement of step-free SiC surfaces by homoepitaxial web growth of thin SiC cantilevers

P. Neudeck | G. Beheim | M. Dudley | P. Abel | J. Powell | A. J. Trunek | W. Vetter | D. Spry | Emye L. Benavage