Markovian petri nets for performance bounds of semiconductor manufacturing systems

Abstract Markovian timed Petri nets are proposed to model a class of semiconductor manufacturing systems with two priority levels. Process priorities, routing priorities, resource re-entrance, and non-preemptive operations are considered. In particular, semiconductor manufacturing systems usually contain non-preemptive operations instead of preemptive operations assumed in prior work. Unifoimization technique is used to establish both lower and upper bounds of the performance of interest. These bounds are computed using linear programming approaches.