Electro-optic MZI modulators, utilizing different phases in proton-exchanged LiTaO3 waveguides

Electro-optic Mach-Zehnder interferometric (MZI) modulators have been fabricated by proton exchange in LiTaO3. Electro-optic efficiency of these modulators has been found to be depending on phase composition of HxLi1-xTaO3 waveguide in full accordance with the data of Raman scattering spectroscopy on microscopic contributions in electro-optic effect for the different HxLi1-xTaO3 phases. These spectroscopy data were used to found an appropriate phase composition and, thus, optimize MZI modulators. The experimental samples of MZI modulator fabricated at the optimal technological conditions exhibit the improved electro-optical efficiency with far superior photorefractive resistance compared to the LiNbO3 waveguides and modulators.