Template-based assembling of SiGe∕Si(001) islands by local anodic oxidation

Template-based SiGe∕Si(001) island formation has been performed by a combination of local anodic oxidation and liquid phase epitaxy. In case of unidirectional stripes the island pattern directly follows along the trenches, whereas a squarelike stripe pattern enforces island nucleation within the oxide-free cavities. The final island size significantly probes an effectively lowered lattice mismatch, thus a locally expanded crystal lattice in noncovered areas of the silicon substrate.

[1]  M. Hanke,et al.  Unidirectional self-assembling of SiGe Stranski-Krastanow islands on Si(113) , 2005 .

[2]  Pierre M. Petroff,et al.  Deterministic Coupling of Single Quantum Dots to Single Nanocavity Modes , 2005, Science.

[3]  O. Schmidt,et al.  Comment on “A growth pathway for highly ordered quantum dot arrays” [Appl. Phys. Lett. 85, 5974 (2004)] , 2005 .

[4]  C. Sow,et al.  Spatially resolved diagnosis of stress-induced breakdown in oxide dots by in situ conducting atomic force microscopy , 2005 .

[5]  J. Gray,et al.  Hierarchical Self-Assembly of Epitaxial Semiconductor Nanostructures , 2004 .

[6]  G. Bauer,et al.  Structural properties of self-organized semiconductor nanostructures , 2004 .

[7]  M. S. Skolnick,et al.  SELF-ASSEMBLED SEMICONDUCTOR QUANTUM DOTS: Fundamental Physics and Device Applications , 2004 .

[8]  M. Hanke,et al.  Equilibrium shape of SiGe Stranski–Krastanow islands on silicon grown by liquid phase epitaxy , 2004 .

[9]  H. Raidt,et al.  Island chain formation during liquid phase epitaxy of SiGe on silicon , 2003 .

[10]  Nikolai N. Ledentsov,et al.  Epitaxy of Nanostructures , 2003 .

[11]  Dennis W. Prather,et al.  Square-lattice photonic crystal microcavities for coupling to single InAs quantum dots , 2003 .

[12]  E. Schöll,et al.  Formation of island chains in SiGe/Si heteroepitaxy by elastic anisotropy , 2001 .

[13]  Christoph Becher,et al.  Photonic crystal microcavities with self-assembled InAs quantum dots as active emitters , 2001 .

[14]  Eric S. Snow,et al.  The kinetics and mechanism of scanned probe oxidation of Si , 2000 .

[15]  G. Wagner,et al.  The transition from ripples to islands in strained heteroepitaxial growth under low driving forces , 1998 .

[16]  Phaedon Avouris,et al.  Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication , 1997 .

[17]  E. Snow,et al.  Fabrication of Si nanostructures with an atomic force microscope , 1994 .