Coupled vibration of a cantilever micro-beam submerged in a bounded incompressible fluid domain

This paper investigates the free vibrations of a cantilever micro-beam submerged in a bounded frictionless and incompressible fluid cavity. Based on the Fourier–Bessel series expansion and using linear potential theory, an analytical method is proposed to analyze the eigenvalue problem, where the fluid effect emerges as an added mass. Wet beam vibration mode shapes together with the sloshing modes of the oscillating liquid are depicted. Moreover, effects of geometrical configuration and fluid density on the natural frequencies of the coupled system are evaluated. Results show that in spite of the high added mass values related to lower modes, presence of the fluid changes the higher modes more effectively.

[1]  Alberto Cardona,et al.  On the calculation of viscous damping of microbeam resonators in air , 2009 .

[2]  Ghader Rezazadeh,et al.  Dynamic characteristics and forced response of an electrostatically-actuated microbeam subjected to fluid loading , 2009 .

[3]  M. Grattarola,et al.  Micromechanical cantilever-based biosensors , 2001 .

[4]  H. Norman Abramson,et al.  Elastic Vibration Characteristics of Cantilever Plates in Water , 1962 .

[5]  Gye-Hyoung Yoo,et al.  Hydroelastic vibration of two identical rectangular plates , 2004 .

[6]  A. Lakis,et al.  Three-dimensional modeling of curved structures containing and/or submerged in fluid , 2008 .

[7]  Bruno Mercier,et al.  On the response of a resonating plate in a liquid near a solid wall , 2007 .

[8]  Thomas Thundat,et al.  Viscous drag measurements utilizing microfabricated cantilevers , 1996 .

[9]  J. Sader Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope , 1998 .

[10]  Vytautas Ostasevicius,et al.  Numerical analysis of fluid–structure interaction effects on vibrations of cantilever microstructure , 2007 .

[11]  Irina Trendafilova,et al.  Analytical modelling and extraction of the modal behaviour of a cantilever beam in fluid interaction , 2007 .

[12]  Colin Atkinson,et al.  The frequency response of a rectangular cantilever plate vibrating in a viscous fluid , 2007 .

[13]  B. Uğurlu,et al.  Linear vibration analysis of cantilever plates partially submerged in fluid , 2003 .

[14]  L. Meirovitch Principles and techniques of vibrations , 1996 .

[15]  Kyeong-Hoon Jeong,et al.  Hydroelastic vibration of two annular plates coupled with a bounded compressible fluid , 2006 .

[16]  Cho-Chung Liang,et al.  The free vibration analysis of submerged cantilever plates , 2001 .

[17]  Rudra Pratap,et al.  Effect of flexural modes on squeeze film damping in MEMS cantilever resonators , 2007 .

[18]  Kyeong-Hoon Jeong,et al.  Free vibration of two identical circular plates coupled with bounded fluid , 2003 .