System and method for improving dynamic performance of capacitive-type micromechanical accelerometer
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The invention mainly discloses a system and method improving the dynamic performance of a capacitive-type micromechanical accelerometer, and the system comprises the capacitive-type micromechanical accelerometer and a detection circuit. The detection circuit comprises a differential capacitor detection module, a charge amplification circuit, a differential amplification module, a PI circuit, a data collector, and a data processing device. The capacitive-type micromechanical accelerometer, the differential capacitor detection module, the charge amplification circuit, the differential amplification module, and the PI circuit are connected in series, thereby forming a closed loop. The data processing device is connected with the PI circuit through a data collector. Through the comparison of relations of the overshoot and steady state response time of the capacitive-type micromechanical accelerometer with set values and the corresponding adjustment of parameters of element of the PI circuit enable the damping of a capacitive-type micromechanical accelerometer system to be changed, so as to adjust the overshoot and steady state response time of the capacitive-type micromechanical accelerometer system to meet the set requirements. The method is simple, is easy to achieve, is convenient to debug, and is lower in cost.