Dark Current Random Telegraph Signals in Solid-State Image Sensors

This paper focuses on the Dark Current-Random Telegraph Signal (DC-RTS) in solid-state image sensors. The DC-RTS is investigated in several bulk materials, for different surface interfaces and for different trench isolation interfaces. The main parameter used to characterize the DC-RTS is the transition maximum amplitude which seems to be the most appropriate for studying the phenomenon and identifying its origin. Proton, neutron and Co-60 Gamma-ray irradiations are used to study DC-RTS induced by both Total Ionizing Dose (TID) and Displacement damage (Dd) dose. Conclusions are drawn by analyzing the correlation between the exponential slope of the transition maximum amplitude histogram and the location of the DC-RTS-induced defects. The presented results can be extrapolated to predict DC-RTS distributions in various kinds of solid state image sensors.

[1]  R. A. Hartmann,et al.  Permanent Damage Produced by Single Proton Interactions in Silicon Devices , 1986, IEEE Transactions on Nuclear Science.

[2]  W. Rabaud,et al.  Radiation Effects in InGaAs and Microbolometer Infrared Sensor Arrays for Space Applications , 2008, IEEE Transactions on Nuclear Science.

[3]  O. Gilard,et al.  Measurements of Random Telegraph Signal in CCDs Irradiated with Protons and Neutrons , 2005, 2005 8th European Conference on Radiation and Its Effects on Components and Systems.

[4]  P. Magnan,et al.  Multilevel RTS in Proton Irradiated CMOS Image Sensors Manufactured in a Deep Submicron Technology , 2008, IEEE Transactions on Nuclear Science.

[5]  G. R. Hopkinson,et al.  Further measurements of random telegraph signals in proton irradiated CCDs , 1995 .

[6]  P. Magnan,et al.  Total Dose Evaluation of Deep Submicron CMOS Imaging Technology Through Elementary Device and Pixel Array Behavior Analysis , 2008, IEEE Transactions on Nuclear Science.

[7]  T. Lee,et al.  An Active Pixel Sensor Fabricated Using CMOS / CCD Process Technology , 1995 .

[8]  Cheryl J. Dale,et al.  Displacement damage extremes in silicon depletion regions , 1989 .

[9]  Bart Dierickx,et al.  Enhanced dark current generation in proton-irradiated CMOS active pixel sensors , 2002 .

[10]  J. Wendler,et al.  Radiation hardness of two-dimensional focal plane detector arrays for LWIR/VLWIR space sounding missions , 2011, 2011 12th European Conference on Radiation and Its Effects on Components and Systems.

[11]  P. Magnan,et al.  Multi level RTS in proton irradiated CMOS image sensors manufactured in deep submicron technology , 2008, 2008 European Conference on Radiation and Its Effects on Components and Systems.

[12]  Matthieu Beaumel,et al.  Cobalt-60, Proton and Electron Irradiation of a Radiation-Hardened Active Pixel Sensor , 2010, IEEE Transactions on Nuclear Science.

[13]  G. Hopkinson Radiation effects in a CMOS active pixel sensor , 2000 .

[14]  P Martin-Gonthier,et al.  Evidence of a Novel Source of Random Telegraph Signal in CMOS Image Sensors , 2011, IEEE Electron Device Letters.

[15]  Eric Costard,et al.  InGaAs focal plane array developments at III-V Lab , 2012, Defense + Commercial Sensing.

[16]  B. Dierickx,et al.  Total dose and displacement damage effects in a radiation-hardened CMOS APS , 2003 .

[17]  R. Reed,et al.  Comparison of Measured Dark Current Distributions With Calculated Damage Energy Distributions in HgCdTe , 2007, IEEE Transactions on Nuclear Science.

[18]  M. R. Skokan,et al.  Noise Attributes of LWIR HDVIP HgCdTe Detectors , 2008 .

[19]  R. Harboe-Sorensen,et al.  Radiation effects on a radiation-tolerant CMOS active pixel sensor , 2004, IEEE Transactions on Nuclear Science.

[20]  E. Martín,et al.  Proton and $\gamma$ -Rays Irradiation-Induced Dark Current Random Telegraph Signal in a 0.18-$\mu{\hbox{m}}$ CMOS Image Sensor , 2013, IEEE Transactions on Nuclear Science.

[21]  A. Bardoux,et al.  Total Ionizing Dose Versus Displacement Damage Dose Induced Dark Current Random Telegraph Signals in CMOS Image Sensors , 2011, IEEE Transactions on Nuclear Science.

[22]  Shoji Kawahito,et al.  Effects of Negative-Bias Operation and Optical Stress on Dark Current in CMOS Image Sensors , 2010, IEEE Transactions on Electron Devices.

[23]  G. R. Hopkinson,et al.  Random telegraph signals from proton-irradiated CCDs , 1993 .

[24]  Pierre Magnan,et al.  Radiation Effects in CMOS Isolation Oxides: Differences and Similarities With Thermal Oxides , 2013, IEEE Transactions on Nuclear Science.