BiCMOS embedded RF-MEMS switch for above 90 GHz applications using backside integration technique
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M. Kaynak | F. Korndorfer | M. Wietstruck | D. Knoll | R. Scholz | B. Tillack | R. Barth | J. Drews | K. Zoschke | U. Haak | K. Schulz | A. Fox | S. Marschmeyer | D. Wolansky | T. Fischer | K. E. Ehwald | C. Wipf | Y. S. Kim | J. S. Kim | W-G. Lee | J. W. Kim
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