Absolute Scale Quantitative Off-Axis Electron Holography at Atomic Resolution.

An absolute scale match between experiment and simulation in atomic-resolution off-axis electron holography is demonstrated, with unknown experimental parameters determined directly from the recorded electron wave function using an automated numerical algorithm. We show that the local thickness and tilt of a pristine thin WSe_{2} flake can be measured uniquely, whereas some electron optical aberrations cannot be determined unambiguously for a periodic object. The ability to determine local specimen and imaging parameters directly from electron wave functions is of great importance for quantitative studies of electrostatic potentials in nanoscale materials, in particular when performing in situ experiments and considering that aberrations change over time.

[1]  M. Duchamp,et al.  Quantitative measurement of mean inner potential and specimen thickness from high-resolution off-axis electron holograms of ultra-thin layered WSe2. , 2017, Ultramicroscopy.

[2]  C. Jia,et al.  Atomic resolution imaging of YAlO3: Ce in the chromatic and spherical aberration corrected PICO electron microscope. , 2017, Ultramicroscopy.

[3]  M. Verstraete,et al.  Quantitative Agreement between Electron-Optical Phase Images of WSe_{2} and Simulations Based on Electrostatic Potentials that Include Bonding Effects. , 2017, Physical review letters.

[4]  M. Farle,et al.  Magnetic Skyrmion Formation at Lattice Defects and Grain Boundaries Studied by Quantitative Off-Axis Electron Holography. , 2017, Nano letters.

[5]  Colin Ophus,et al.  Automatic software correction of residual aberrations in reconstructed HRTEM exit waves of crystalline samples , 2016, Advanced Structural and Chemical Imaging.

[6]  L. Allen,et al.  Quantitative STEM Imaging of Order-Disorder Phenomena in Double Perovskite Thin Films. , 2016, Physical review letters.

[7]  L. Houben,et al.  FEI Titan G3 50-300 PICO , 2015 .

[8]  C. Jia,et al.  Determination of the 3D shape of a nanoscale crystal with atomic resolution from a single image. , 2014, Nature materials.

[9]  E. Reed,et al.  Structural phase transitions in two-dimensional Mo- and W-dichalcogenide monolayers , 2014, Nature Communications.

[10]  J. Barthel,et al.  On the optical stability of high-resolution transmission electron microscopes. , 2013, Ultramicroscopy.

[11]  H. Müller,et al.  Thermal magnetic field noise limits resolution in transmission electron microscopy. , 2013, Physical review letters.

[12]  R. Dittmann,et al.  Atomic-Scale Measurement of Structure and Chemistry of a Single-Unit-Cell Layer of LaAlO3 Embedded in SrTiO3 , 2013, Microscopy and Microanalysis.

[13]  M. Weyland,et al.  Sub-0.1 nm-resolution quantitative scanning transmission electron microscopy without adjustable parameters , 2012 .

[14]  Michael Lehmann,et al.  State of the art in atomic resolution off-axis electron holography , 2012 .

[15]  H. H. Liu,et al.  Three-Dimensional Orientation Mapping in the Transmission Electron Microscope , 2011, Science.

[16]  Susanne Stemmer,et al.  Standardless atom counting in scanning transmission electron microscopy. , 2010, Nano letters.

[17]  M. Haider,et al.  Information Transfer in a TEM Corrected for Spherical and Chromatic Aberration , 2010, Microscopy and Microanalysis.

[18]  Rafal E. Dunin-Borkowski,et al.  Dopant profiling of focused ion beam milled semiconductors using off-axis electron holography; reducing artifacts, extending detection limits and reducing the effects of gallium implantation , 2010 .

[19]  Adrian Avramescu,et al.  Measurement of specimen thickness and composition in Al(x)Ga(1-x)N/GaN using high-angle annular dark field images. , 2009, Ultramicroscopy.

[20]  A. Thust.  High-resolution transmission electron microscopy on an absolute contrast scale. , 2009, Physical review letters.

[21]  P. Midgley,et al.  Electron tomography and holography in materials science. , 2009, Nature materials.

[22]  J. Barthel,et al.  Quantification of the information limit of transmission electron microscopes. , 2008, Physical review letters.

[23]  K. Urban,et al.  Studying Atomic Structures by Aberration-Corrected Transmission Electron Microscopy , 2008, Science.

[24]  C. Dwyer,et al.  Method to measure spatial coherence of subangstrom electron beams , 2008 .

[25]  M. Lehmann,et al.  Electron Holography: Applications to Materials Questions , 2007 .

[26]  M. Lehmann.  Influence of the elliptical illumination on acquisition and correction of coherent aberrations in high-resolution electron holography. , 2004, Ultramicroscopy.

[27]  David J. Smith,et al.  Semiconductor dopant profiling by off-axis electron holography. , 2003, Ultramicroscopy.

[28]  M. Lehmann,et al.  Ferroelectric electron holography. , 2002, Ultramicroscopy.

[29]  Kirkland,et al.  Experimental characterisation of CCD cameras for HREM at 300 kV , 2000, Ultramicroscopy.

[30]  Ondrej L. Krivanek,et al.  Towards sub-Å electron beams , 1999 .

[31]  Stephan Uhlemann,et al.  A spherical-aberration-corrected 200 kV transmission electron microscope , 1998 .

[32]  Q. Liu,et al.  Determination of crystallographic and macroscopic orientation of planar structures in TEM , 1998 .

[33]  D. Stenkamp.  Detection and quantitative assessment of image aberrations from single HRTEM lattice images , 1998 .

[34]  M. Lehmann,et al.  Artefacts in electron holography , 1996 .

[35]  D. Van Dyck,et al.  Fine-tuning of the focal residue in exit-wave reconstruction , 1996 .

[36]  Qing Liu.  A simple and rapid method for determining orientations and misorientations of crystalline specimens in TEM , 1995 .

[37]  W. You,et al.  An X-ray Measurement of Debye Wailer Factors of Single Crystal MoSe2 and WSe2 , 1988 .

[38]  T. Mulvey.  Experimental High-resolution Electron Microscopy , 1981 .

[39]  M. Whelan,et al.  Anomalous electron absorption effects in metal foils: theory and comparison with experiment , 1962, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[40]  J. M. Cowley,et al.  The scattering of electrons by atoms and crystals. I. A new theoretical approach , 1957 .

[41]  David C. Joy,et al.  Introduction to electron holography , 1999 .

[42]  Kazuo Ishizuka,et al.  Contrast transfer of crystal images in TEM , 1980 .

[43]  F. Zemlin,et al.  Coma-free alignment of high-resolution electron microscopes with the aid of optical diffractograms , 1978 .

[44]  D Köstler,et al.  Determination of the wave aberration of electron lenses from superposition diffractograms of images with differently tilted illumination. , 1977, Ultramicroscopy.

[45]  John A. Nelder,et al.  A Simplex Method for Function Minimization , 1965, Comput. J..