论文信息 - Multi-Scale Thickness and Roughness Characterization of Thin Silicon-On-Insulator Films - 字舞流文

Multi-Scale Thickness and Roughness Characterization of Thin Silicon-On-Insulator Films

A. Claverie | P. Acosta-Alba | O. Kononchuk | C. Bertrand-Giuliani | Gregory Riou | C. Moulin