RF MEMS Impedance Tuners for 6-24 GHz Applications

RF MEMS tuners with wide impedance coverage have been developed for 6- 24 GHz noise parameter and load-pull measurement systems. The tuners are based on tri- ple-, double-, and single-stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10-13 switched MEMS capacitors to produce 1024- 8192 (2 10 -2 13 ) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to-date. V

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