Nanoporous Pd Film Sensors for Detection of High Concentration Hydrogen

Blistering of Pd films upon absorption of high concentration hydrogen is one of the big problems for hindering wide application of Pd-film hydrogen sensors. We fabricated robust nanoporous Pd sensors with anodic aluminum oxide (AAO) as a substrate and Ni as a transition layer. The resistive sensors have a quick and reversible response to hydrogen gas at room temperature. Unlike dense Pd films supported by traditional wafers, the AAO-supported nanoporous films are highly stable in detecting high concentration hydrogen (up to 10% H2).

[1]  Ingemar Lundström,et al.  A hydrogen−sensitive MOS field−effect transistor , 1975 .

[2]  C. Svensson,et al.  A hydrogen-sensitive Pd-gate MOS transistor , 1975 .

[3]  C. Nylander,et al.  Blister formation in Pd gate MIS hydrogen sensors , 1982, IEEE Electron Device Letters.

[4]  T. Matsuo,et al.  No blister formation Pd/Pt double metal gate MISFET hydrogen sensors , 1984, IEEE Electron Device Letters.

[5]  Andreas Mandelis,et al.  Solid‐State Sensors for Trace Hydrogen Gas Detection , 1991 .

[6]  Ingemar Lundström,et al.  From hydrogen sensors to olfactory images — twenty years with catalytic field-effect devices , 1993 .

[7]  M. Minato,et al.  Vacuum characteristics of sprayed metal films , 2001 .

[8]  Toshio Nakamura,et al.  Simulations of Crack Propagation in Porous Materials , 2001 .

[9]  M. Sailor,et al.  A porous silicon-palladium composite film for optical interferometric sensing of hydrogen. , 2004, Langmuir : the ACS journal of surfaces and colloids.

[10]  Joel Villatoro,et al.  Fast detection of hydrogen with nano fiber tapers coated with ultra thin palladium layers. , 2005, Optics express.

[11]  Characterization of porous poly-silicon impregnated with Pd as a hydrogen sensor , 2005 .

[12]  Zhili Xiao,et al.  Self-assembled monolayer-enhanced hydrogen sensing with ultrathin palladium films , 2005 .

[13]  Shekhar Bhansali,et al.  Development of a highly sensitive porous Si-based hydrogen sensor using Pd nano-structures , 2005 .