论文信息 - Monolithically integrated VCSELs and photodetectors for microsystem applications

Monolithically integrated VCSELs and photodetectors for microsystem applications

Summary form only given. We have fabricated integrated resonated cavity photodetectors with selectively oxidized VCSELs by etching away a portion of the top distributed Bragg reflector mirror of nominally 850 nm VCSEL lasers.

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