Testing the Limits for Resists
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Advances in materials chemistry have been crucial to the microelectronics revolution. But to shrink devices further requires knowledge of the resolution limits of existing and new materials. In their Perspective, [Reichmanis and Nalamasu][1] highlight the report by [ Lin et al .][2], who report a versatile technique for obtaining such information at nanometer resolution.
[1]: http://www.sciencemag.org/cgi/content/full/297/5580/349
[2]: http://www.sciencemag.org/cgi/content/short/297/5580/372