An accurate model for capacitive micromachined ultrasonic transducers
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Giosue Caliano | Antonio Iula | Alessandro Caronti | Massimo Pappalardo | M. Pappalardo | G. Caliano | A. Iula | A. Iula | A. Caronti | G. Caliano | Massimo Pappalardo
[1] W. E. Langlois. Isothermal squeeze films , 1961 .
[2] Christofer Hierold,et al. Surface micromachined ultrasound transducers in CMOS technology , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.
[3] I. Ladabaum,et al. The microfabrication of capacitive ultrasonic transducers , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[4] Mauri Luukkala,et al. A model for an electrostatic ultrasonic transducer with a grooved backplate , 1992 .
[5] D. Schindel,et al. The design and characterization of micromachined air-coupled capacitance transducers , 1995, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[6] K. Suzuki,et al. A silicon electrostatic ultrasonic transducer , 1989, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[7] Michael J. Anderson,et al. BROADBAND ELECTROSTATIC TRANSDUCERS : MODELING AND EXPERIMENTS , 1995 .
[8] W. P. Mason. Electromechanical transducers and wave filters , 1942 .
[9] B. Khuri-Yakub,et al. Surface micromachined capacitive ultrasonic transducers , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[10] J S Heyman,et al. Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids. , 1979, The Review of scientific instruments.
[11] Arthur W. Leissa,et al. Vibration of Plates , 2021, Solid Acoustic Waves and Vibration.
[12] Carlo Cercignani,et al. Flow of a Rarefied Gas between Two Parallel Plates , 1963 .
[13] L F Ge. Electrostatic airborne ultrasonic transducers: modeling and characterization. , 1999, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.
[14] Timo Veijola,et al. The influence of gas-surface interaction on gas-film damping in a silicon accelerometer , 1998 .
[15] Robert B. Darling,et al. Compact analytical modeling of squeeze film damping with arbitrary venting conditions using a Green's function approach , 1998 .
[16] F. Holzweißig,et al. A. W. Leissa, Vibration of Plates. (Nasa Sp‐160). VII + 353 S. m. Fig. Washington 1969. Office of Technology Utilization National Aeronautics and Space Administration. Preis brosch. $ 3.50 , 1971 .
[17] C. Wykes,et al. Diagnostic measurements in capacitive transducers , 1993 .
[18] Butrus T. Khuri-Yakub,et al. Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers , 1999 .
[19] I. Ladabaum,et al. An improved circuit model of MUTs , 1997, 1997 IEEE Ultrasonics Symposium Proceedings. An International Symposium (Cat. No.97CH36118).