Deposition of silicon-containing diamond-like carbon films by plasma-enhanced chemical vapour deposition

[1]  H. Du,et al.  Temperature effect on bonding structures of amorphous carbon containing more than 30at.% silicon , 2007 .

[2]  C. Comte,et al.  The mechanical and biocompatibility properties of DLC-Si films prepared by pulsed DC plasma activated chemical vapor deposition , 2007 .

[3]  Qi Zhao,et al.  Bacterial adhesion on silicon-doped diamond-like carbon films , 2007 .

[4]  H. Du,et al.  Relationship between bonding structure and mechanical properties of amorphous carbon containing silicon , 2007 .

[5]  Y. F. Mei,et al.  Characteristics and surface energy of silicon-doped diamond-like carbon films fabricated by plasma immersion ion implantation and deposition , 2006 .

[6]  Y. Funaki,et al.  Investigation of DLC-Si coatings in large-scale production using DC-PACVD equipment , 2006 .

[7]  I. Bertóti,et al.  Incorporation of Si in a-C:Si:H films monitored by infrared excited Raman scattering , 2006 .

[8]  S. Miyagawa,et al.  Effects of Si content in DLC films on their friction and wear properties , 2005 .

[9]  James Alastair McLaughlin,et al.  The effects of Si incorporation on the electrochemical and nanomechanical properties of DLC thin films , 2002 .

[10]  P. Maguire,et al.  A study of microstructure and nanomechanical properties of silicon incorporated DLC films deposited on silicon substrates , 2001 .

[11]  M. Hon,et al.  Wear behavior of silicon-containing diamond-like carbon coatings , 1998 .

[12]  S. S. Camargo,et al.  Improved high-temperature stability of Si incorporated a-C:H films , 1998 .

[13]  M. Ramsteiner,et al.  Resonant Raman scattering of hydrogenated amorphous carbon: Evidence for π‐bonded carbon clusters , 1987 .

[14]  John A. Woollam,et al.  Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films , 1984 .