论文信息 - Dynamic excitation: a noninvasive technique for initiating stiction repair in MEMS

Dynamic excitation: a noninvasive technique for initiating stiction repair in MEMS

Commercial applications of micro-electromechanical systems (MEMS) continue to be plagued by reliability issues encountered during fabrication and operation. One of the most prevalent problems is the adhesion between adjacent components since adhesive forces are known to promote wear and defect-related failures. In extreme circumstances, the adhesion is large enough to prevent separation, a phenomenon commonly referred to as stiction-failure. The objective of current work is to determine analytically whether dynamic excitation may be used to repair stiction-failed cantilevers. This is accomplished by relating the structural dynamic response to the de-cohesion of stiction-failed micro-cantilever beams under various loading conditions.

Kevin D. Murphy | Amit Savkar | Matthew R. Begley

[1] John W. Hutchinson,et al. Dynamic Fracture Mechanics , 1990 .

[2] J. W. Rogers,et al. Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantilevers , 2003 .

[3] N. C. Tien,et al. Ultrashort-pulse laser heating of silicon to reduce microstructure adhesion , 1996 .

[4] J. Bokor,et al. Surface adhesion reduction in silicon microstructures using femtosecond laser pulses , 1996 .

[5] C. Mastrangelo,et al. A simple experimental technique for the measurement of the work of adhesion of microstructures , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

[6] K. D. Murphy,et al. Adhesion of micro-cantilevers subjected to mechanical point loading: modeling and experiments , 2003 .