论文信息 - Surface reactions during etching of organic low-k films by plasmas of N2 and H2 - 字舞流文

Surface reactions during etching of organic low-k films by plasmas of N2 and H2

S. Yamasaki | S. Samukawa | K. Ishikawa | Y. Yamazaki | Y. Ishikawa | M. Nakamura | Y. Yamaoka | Moritaka Nakamura