B. A. Rashap

Real-time feedback control of reactive ion etching

Tyrone L. Vincent, Pramod P. Khargonekar, M. D. Giles, 1994, Other Conferences.

A feedback limitation of decentralized controllers for TITO systems, with application to a reactive ion etcher

Jessy W. Grizzle, Jim Freudenberg, B. A. Rashap, 1994, Proceedings of 1994 33rd IEEE Conference on Decision and Control.

Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher

James Moyne, Pramod P. Khargonekar, Jessy W. Grizzle, 1995 .

Real-time feedback for sidewall profile control in reactive ion etching

B. A. Rashap, J. Freudenberg, M. Elta, 1995 .

Sensor systems for real-time feedback control of reactive ion etching

B. A. Rashap, J. Grizzle, P. Khargonekar, 1996 .

Real-time control of reactive ion etching: identification and disturbance rejection

Pramod P. Khargonekar, Jessy W. Grizzle, Jim Freudenberg, 1993, Proceedings of 32nd IEEE Conference on Decision and Control.

Applications of Control to Semiconductor Manufacturing: Reactive Ion Etching

P. T. Kabamba, D. Teneketzis, S. Lafortune, 1993, 1993 American Control Conference.

Nonlinear system identification and control of a reactive ion etcher

B. A. Rashap, T.L. Vincent, P.P. Khargonekar, 1994, Proceedings of 1994 American Control Conference - ACC '94.