Failure probability estimation with differently sized reference products for semiconductor burn-in studies

A burn-in study is applied to demonstrate compliance with a targeted early life failure probability of semiconductor products. This is achieved by investigating a sample of the produced chips for reliability-relevant failures. Usually, a burn-in study is carried out for a specific reference product with the aim to scale the reference product's failure probability to follower products with different chip sizes. It also appears, however, that there are multiple, differently sized reference products for which burn-in studies are performed. In this paper, we present a novel model for estimating the failure probability of a chip, which is capable of handling burn-in studies on multiple reference products. We discuss the model from a combinatorial and a Bayesian perspective; both approaches are shown to provide more accurate estimation results in comparison with a simple area-based approach. Moreover, we discuss the required modifications of the model if the observed failures are tackled by countermeasures implemented in the chip production process. Finally, the model is applied to the problem of determining the failure probabilities of follower products on the basis of multiple reference products.

[1]  E.R. St Pierre,et al.  Reliability improvement and burn in optimization through the use of die level predictive modeling , 2005, 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual..

[2]  Way Kuo,et al.  Reliability, Yield, and Stress Burn-In: A Unified Approach for Microelectronics Systems Manufacturing & Software Development , 2014 .

[3]  W. Weibull A Statistical Distribution Function of Wide Applicability , 1951 .

[4]  Serge N. Demidenko,et al.  Shortening Burn-In Test: Application of HVST and Weibull Statistical Analysis , 2007, IEEE Transactions on Instrumentation and Measurement.

[5]  Finn Jensen Electronic Component Reliability: Fundamentals, Modelling, Evaluation, and Assurance , 1996 .

[6]  Sholom M. Weiss,et al.  IBM Research Report Data Analytics and Stochastic Modeling in a Semiconductor Fab , 2009 .

[7]  Richard E. Barlow,et al.  Statistical Theory of Reliability and Life Testing: Probability Models , 1976 .

[8]  E. S. Pearson,et al.  THE USE OF CONFIDENCE OR FIDUCIAL LIMITS ILLUSTRATED IN THE CASE OF THE BINOMIAL , 1934 .

[9]  J. Ibrahim,et al.  On Optimality Properties of the Power Prior , 2003 .

[10]  Gilberto A. Paula,et al.  Robust statistical modeling using the Birnbaum-Saunders- t distribution applied to insurance , 2012 .

[11]  Jürgen Pilz,et al.  Failure probability estimation under additional subsystem information with application to semiconductor burn-in , 2017 .

[12]  Chin-Diew Lai,et al.  Constructions and applications of lifetime distributions , 2013 .

[13]  Bernd A. Berg Clopper-Pearson bounds from HEP data cuts , 2001 .

[14]  N. L. Johnson,et al.  Discrete Multivariate Distributions , 1998 .

[15]  Jürgen Pilz,et al.  Advanced Bayesian Estimation of Weibull Early Life Failure Distributions , 2014, Qual. Reliab. Eng. Int..

[16]  Linda Milor,et al.  Area Scaling for Backend Dielectric Breakdown , 2010, IEEE Transactions on Semiconductor Manufacturing.

[17]  Lurdes Y. T. Inoue,et al.  Decision Theory: Principles and Approaches , 2009 .

[18]  Jie Mi,et al.  Bounds to optimal burn-in and optimal work size: Research Articles , 2005 .

[19]  Manuel Galea,et al.  Diagnostics in Birnbaum-Saunders accelerated life models with an application to fatigue data , 2014 .

[20]  Serge N. Demidenko,et al.  Reducing burn-in time through high-voltage stress test and Weibull statistical analysis , 2006, IEEE Design & Test of Computers.

[21]  R. Cousins,et al.  Frequentist evaluation of intervals estimated for a binomial parameter and for the ratio of Poisson means , 2009, 0905.3831.

[22]  L. Brown,et al.  Interval Estimation for a Binomial Proportion , 2001 .

[23]  Jie Mi,et al.  Bounds to optimal burn‐in and optimal work size , 2005 .

[24]  T. Tony Cai,et al.  Confidence Intervals for a binomial proportion and asymptotic expansions , 2002 .

[25]  Jürgen Pilz,et al.  Decision-Theoretical Model for Failures Which are Tackled by Countermeasures , 2014, IEEE Transactions on Reliability.

[26]  Ron S. Kenett,et al.  Industrial statistics applications in the semiconductor industry: some examples , 2013 .

[27]  Jürgen Pilz,et al.  An advanced area scaling approach for semiconductor burn-in , 2015, Microelectron. Reliab..

[28]  Seymour Geisser,et al.  On Prior Distributions for Binary Trials , 1984 .

[29]  Way Kuo,et al.  Facing the headaches of early failures: A state-of-the-art review of burn-in decisions , 1983 .

[30]  Russell B. Miller,et al.  Unit level predicted yield: a method of identifying high defect density die at wafer sort , 2001, Proceedings International Test Conference 2001 (Cat. No.01CH37260).