A Modeling Method of Electromagnetic Micromirror in Random Noisy Environment

In this paper, a data-driven modeling method for electromagnetically actuated micromirror in random noisy environment is proposed. In this method, the electromagnetic micromirror is considered as a dynamic system with preceded hysteresis. Then, a linear dynamic submodel is used to describe the angular deflection mechanism, while a preceded rate-dependent hysteresis submodel is used to depict the hysteresis phenomenon inherent in the electromagnetic driver. By considering the influence of random noise on the micromirror, an on-line modeling scheme with varying weighting factors is studied to handle the data contaminated by random noises. Subsequently, the convergence of proposed modeling method is analyzed. Finally, the experimental results of the proposed modeling scheme for an electromagnetically actuated micromirror are presented.

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