An Untethered, Electrostatic, Globally Controllable

[1]  Isao Shimoyama,et al.  Insect-model-based microrobot , 2006, Artificial Life and Robotics.

[2]  T. P. Ma Opportunities and challenges for high-k gate dielectrics , 2004, IPFA 2004.

[3]  Robert Puers,et al.  A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches , 2004 .

[4]  Craig D. McGray,et al.  Power delivery and locomotion of untethered microactuators , 2003 .

[5]  Robert Fitch,et al.  Distributed control for unit-compressible robots: goal-recognition, locomotion, and splitting , 2002 .

[6]  Luigi Fortuna,et al.  Development of autonomous, mobile micro-electro-mechanical devices , 2002, 2002 IEEE International Symposium on Circuits and Systems. Proceedings (Cat. No.02CH37353).

[7]  Shigeoki Hirai,et al.  Combination of vision servoing techniques and VR-based simulation for semi-autonomous microassembly workstation , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[8]  D. Collard,et al.  A large stepwise motion electrostatic actuator for a wireless microrobot , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[9]  Robert Puers,et al.  Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed–free end conditions , 2002 .

[10]  Zack J. Butler,et al.  Self-reconfiguring robots , 2002, CACM.

[11]  Gregory T. A. Kovacs,et al.  OMNIDIRECTIONAL WALKING MICROROBOT REALIZED BY THERMAL MICROACTUATOR ARRAYS , 2001 .

[12]  Josep Samitier,et al.  From decimeter- to centimeter-sized mobile microrobots: the development of the MINIMAN system , 2001, Optics East.

[13]  Deepak Uttamchandani,et al.  Detailed study of scratch drive actuator characteristics using high-speed imaging , 2001, SPIE MOEMS-MEMS.

[14]  Marsette Vona,et al.  Crystalline Robots: Self-Reconfiguration with Compressible Unit Modules , 2001, Auton. Robots.

[15]  Victor M. Bright,et al.  Prototype microrobots for micro-positioning and micro-unmanned vehicles , 2000 .

[16]  Thomas R. Ohnstein,et al.  Factors enhancing the reliability of touch-mode electrostatic actuators , 2000 .

[17]  Sergej Fatikow,et al.  A Flexible Microrobot-Based Microassembly Station , 2000, J. Intell. Robotic Syst..

[18]  Daniela Rus,et al.  Locomotion versatility through self-reconfiguration , 1999, Robotics Auton. Syst..

[19]  Michael Hietschold,et al.  Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) , 1998 .

[20]  Akihiro Torii,et al.  An Analysis of the Elastic Deformation of an Electrostatic Microactuator , 1998 .

[21]  Hiroyuki Fujita,et al.  A quantitative analysis of scratch drive actuation for integrated X/Y motion system , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[22]  S. Senturia,et al.  M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures , 1997 .

[23]  Kristofer S. J. Pister,et al.  Surface-micromachined components for articulated microrobots , 1996 .

[24]  Michael Sipser,et al.  Introduction to the Theory of Computation , 1996, SIGA.

[25]  Albert K. Henning,et al.  Out-of-plane microstructures using stress engineering of thin films , 1995, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[26]  H. Fujita,et al.  A quantitative analysis of Scratch Drive Actuator using buckling motion , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[27]  Peter M. Osterberg,et al.  Electrostatically actuated microelectromechanical test structures for material property measurement , 1995 .

[28]  Isao Shimoyama,et al.  Microrobot actuated by a vibration energy field , 1994 .

[29]  I. Shimoyama,et al.  Insect-model based microrobot with elastic hinges , 1994 .

[30]  Terunobu Akiyama,et al.  Controlled stepwise motion in polysilicon microstructures , 1993 .

[31]  Paolo Dario,et al.  Microactuators for microrobots: a critical survey , 1992 .

[32]  J A Dobrowolski,et al.  Investigation of the evaporation process conditions on the optical constants of zirconia films. , 1989, Applied optics.

[33]  R. Jaeger Introduction to microelectronic fabrication , 1987 .

[34]  Tomás Lozano-Pérez,et al.  An algorithm for planning collision-free paths among polyhedral obstacles , 1979, CACM.

[35]  K. Petersen Dynamic micromechanics on silicon: Techniques and devices , 1978, IEEE Transactions on Electron Devices.

[36]  H. Hermes On Local and Global Controllability , 1974 .

[37]  H. Nathanson,et al.  The resonant gate transistor , 1967 .