Disturbance feedforward control for vibration isolation systems : analysis, design, and implementation

Performance of high-precision machines in terms of accuracy and throughput is often limited by undesired vibrations. To deal with such vibrations, active vibration isolation systems are used. Undesired vibrations can enter the machine either as floor vibrations transmitted via the vibration isolator, or as direct disturbances acting on the isolated payload. Various feedback control methods have been developed in the past to further improve the vibration isolation performance. However, high-gain feedback can lead to stability problems and undesired amplification of sensor and actuator noise, which poses a problem for vibration isolation performance. In view of this problem, disturbance feedforward control (DFC) seems a promising alternative as it does not affect the closed-loop stability properties, and generally induces less amplification of sensor noise. The aim of this thesis is to develop a theoretical framework to show the possibilities and limitations of DFC, and to provide the design tools for identification and control toward an implementation of DFC in next-generation active vibration isolation systems, and has four main contributions. The first contribution consists of a detailed analysis of design and performance tradeoffs in DFC for Multi-Input Multi-Output (MIMO) systems. These tradeoffs occur in the feedforward sensitivity matrix due to causality aspects, i.e. disturbances must be measured before any compensation can be applied. This leads to performance limitations similar to the waterbed effect in feedback control. Given these tradeoffs, the cost of disturbance rejection can be minimized by only reducing the principal gains of the feedforward sensitivity matrix that correspond to the disturbance directions, and only at frequencies that are relevant for disturbance rejection. This generally results in a centralized controller being the optimal solution if the disturbances are correlated, even in cases where the system itself is perfectly decoupled. The second contribution consists of an identification approach to estimate the frequency response function (FRF) of the transmissibility matrix. This matrix is a performance measure describing the ability to suppress floor vibrations

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