Robust feedforward-feedback control of a hysteretic piezocantilever under thermal disturbance

In micromanipulation, piezoelectric cantilevers are commonly used in grippers performing pick-and-place of micro-objects. Indeed, these materials oer high accuracy and high speed. On the one hand, when working with large electric field, the behavior of the piezocantilevers provides hysteresis nonlinearity reducing their performances. On the other hand, the temperature variation of the workspace influences the accuracy. In this paper, a feedforward control is used to linearize the hysteresis and a robust feedback controller is implemented to reject the thermal disturbance. The former is based on the inverse Prandtl model while the second on the H1 robust control.

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