CMOS Integrated Organic Ciliary Actuator Arrays For General-Purpose Micromanipulation Tasks

The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This device is composed of an 8 × 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4mm × 9.4mm. The polyimide based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that integration was successful.

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