CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects

The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This ciliary array is composed of an 8/spl times/8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4/spl times/9.4 mm. The polyimide-based actuators were fabricated directly above the selection and drive circuitry, Selection and activation of actuators in this array shows that integration was successful. The array was programmed to do simple linear and diagonal translations and squeeze-, centering-, and rotating-field manipulations. All three tasks were demonstrated using silicon pieces of various shapes and either 0.55 mm or 0.10 mm thick.

[1]  L. Hartsough.  Resistivity of bias-sputtered TiW films , 1979 .

[2]  New Coupling Method for Polyimide Adhesion to LSI Surface , 1982 .

[3]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[4]  Junichi Imaizumi,et al.  Low Thermal Expansion Polyimides and their Applications , 1987 .

[5]  Development of heating resistor for versatile thermal print heads , 1989 .

[6]  Steven K. Feiner,et al.  Computer graphics: principles and practice (2nd ed.) , 1990 .

[7]  T. S. Hickernell,et al.  The elastic properties of thin-film silicon nitride , 1990, IEEE Symposium on Ultrasonics.

[8]  K. Pister,et al.  A planar air levitated electrostatic actuator system , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[9]  Hiroyuki Fujita,et al.  Fabrication and operation of polyimide bimorph actuators for a ciliary motion system , 1993 .

[10]  I.J. Busch-Vishniac.  Micro-automating semiconductor fabrication , 1991, IEEE Circuits and Devices Magazine.

[11]  H. Fujita,et al.  Array-driven ultrasonic microactuators , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[12]  Henry Baltes,et al.  Silicon gas flow sensors using industrial CMOS and bipolar IC technology , 1991 .

[13]  K. J. Gabriel,et al.  New opportunities for microactuators , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[14]  Masayoshi Esashi,et al.  Fabrication of distributed electrostatic micro actuator (DEMA) , 1993 .

[15]  Henry Baltes,et al.  CMOS as sensor technology , 1993 .

[16]  S. Goodwin-Johansson,et al.  Integrated force arrays , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[17]  N. C. MacDonald,et al.  An isolation technology for joined tungsten MEMS , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[18]  Hiroyuki Fujita,et al.  A conveyance system using air flow based on the concept of distributed micro motion systems , 1994 .

[19]  CHIP-LEVEL ENCAPSULATION OF IMPLANTABLE CMOS MICROELECTRONIC ARRAYS , 1994 .

[20]  Gregory T. A. Kovacs,et al.  Characterization Of Multi-segment Organic Thermal Actuators , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[21]  Peter M. Will,et al.  Parts manipulation on an intelligent motion surface , 1995, Proceedings 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human Robot Interaction and Cooperative Robots.

[22]  W. Riethmuller,et al.  Novel Process For A Monolithic Integrated Accelerometer , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[23]  V. V. Baranov,et al.  Properties of titanium-tungsten thin films obtained by magnetron sputtering of composite cast targets , 1995 .

[24]  Chih-Ming Ho,et al.  A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[25]  Henry Baltes,et al.  Future of IC microtransducers , 1996 .

[26]  Albert P. Pisano,et al.  Polysilicon integrated microsystems: technologies and applications , 1996 .

[27]  N. C. MacDonald,et al.  Single-crystal silicon actuator arrays for micro manipulation tasks , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[28]  N. C. MacDonald,et al.  Upper and Lower Bounds for Programmable Vector Fields with Applications to MEMS and Vibratory Plate Parts Feeders , 1996 .

[29]  R. D. Nasby,et al.  Application of chemical-mechanical polishing to planarization of surface-micromachined devises , 1996 .

[30]  Wolfgang Kronast,et al.  LPCVD against PECVD for micromechanical applications , 1996 .

[31]  Gregory T. A. Kovacs,et al.  Diode-based thermal r.m.s. converter with on-chip circuitry fabricated using CMOS technology , 1996 .

[32]  P. French.  TOPICAL REVIEW: Development of surface micromachining techniques compatible with on-chip electronics , 1996 .

[33]  Hiroyuki Fujita,et al.  Group work of distributed microactuators , 1996, Robotica.

[34]  Karl-Friedrich Bohringer,et al.  Programmable force fields for distributed manipulation, and their implementation using micro-fabricated actuator arrays , 1997 .

[35]  Thomas Ertl,et al.  Computer Graphics - Principles and Practice, 3rd Edition , 2014 .

[36]  K. J. Gabriel,et al.  Distributed MEMS: new challenges for computation , 1997 .

[37]  Haruo Nakazawa,et al.  The two-dimensional micro conveyer: principles and fabrication process of the actuator , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[38]  Gregory T. A. Kovacs,et al.  Organic thermal and electrostatic ciliary microactuator array for object manipulation , 1997 .

[39]  E. Peeters.  Challenges in commercializing MEMS , 1997 .

[40]  Hiroyuki Fujita,et al.  Two dimensional micro conveyance system with through holes for electrical and fluidic interconnection , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[41]  Gregory T. A. Kovacs,et al.  Ciliary microactuator array for scanning electron microscope positioning stage , 1998 .

[42]  B. Donald,et al.  Part Orientation with One or Two Stable Equilibria Using Programmable Vector Fields , 1999 .

[43]  G. Stemme,et al.  A robust micro conveyer realized by arrayed polyimide joint actuators , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[44]  Y.C. Lee,et al.  Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[45]  R. Howe,et al.  Post-CMOS integration of germanium microstructures , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[46]  Bruce Randall Donald,et al.  Part orientation with one or two stable equilibria using programmable force fields , 2000, IEEE Trans. Robotics Autom..