A review: additive manufacturing of flexure mechanism for nanopositioning system

A comprehensive review relevant to the design and fabrication of nanopositioning stages based on additive manufacturing (AM) technology has been for the first time introduced in the academic society. With the development of AM technology, AM has been applied in many engineering design areas such as aerospace, automotive, consumer electronics, and so on. Due to current limitations of AM tolerance (surface quality, form error), process obscurity (melting pool, layer adhesion), and cost (especially for metals or composites), there are only a small number of AM-applied devices that are currently available either in the market or in many industry sectors above. The flexure mechanisms that are typically employed in nanopositioning applications can provide a sub-nanometer resolution motion; however, their current manufacturing methods (milling, electric discharge machining, water jet machining) not only limit complicated flexure mechanisms in 3D geometries but also prevent designers from challenging novel topology optimizations. AM can overcome those limitations of fabrication and material distribution. Furthermore, it can allow new design approaches to topology optimizations. This review presents current and future AM-based precision motion device applications. Here, both design and fabrication of flexure mechanisms applied with current AM technology and the potential of further developments were discussed.

[1]  Y. Chivel’,et al.  Optical In-Process Temperature Monitoring of Selective Laser Melting , 2013 .

[2]  Nicholas G. Dagalakis,et al.  Design of MEMS based three-axis motion stage by incorporating a nested structure , 2014 .

[3]  M. Shioya,et al.  Compressive strengths of single carbon fibres and composite strands , 2000 .

[4]  Tat Joo Teo,et al.  A 3-D Printed Ti-6Al-4V 3-DOF Compliant Parallel Mechanism for High Precision Manipulation , 2017, IEEE/ASME Transactions on Mechatronics.

[5]  Edward J. Garboczi,et al.  Porosity of additive manufacturing parts for process monitoring , 2014 .

[6]  H. Fraser,et al.  Characterization of Ti-Al-Er alloy produced via direct laser deposition , 2003 .

[7]  Brandon M. Lane,et al.  Infrared thermography for laser-based powder bed fusion additive manufacturing processes , 2014 .

[8]  A. Fahr,et al.  Nondestructive measurement of porosity in thermal barrier coatings , 2003 .

[9]  Michael Arthur Cullinan,et al.  Design of a flexure based xy precision nanopositioner with a two inch travel range for micro-scale selective laser sintering , 2016 .

[10]  M. McEvoy,et al.  Thermoplastic variable stiffness composites with embedded, networked sensing, actuation, and control , 2015 .

[11]  K. Hoshino,et al.  Large displacement nanopositioning flexure fabricated by direct 3D printing of Titanium , 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

[12]  L. Froyen,et al.  Fundamentals of Selective Laser Melting of alloyed steel powders , 2006 .

[13]  A. Yuksel,et al.  Design and Modeling of a Microscale Selective Laser Sintering System , 2016 .

[14]  Porosity detection in composite aeronautical structures , 2002 .

[15]  Douglas C. Hofmann,et al.  Compositionally graded metals: A new frontier of additive manufacturing , 2014 .

[16]  T. Ueda,et al.  Melt Pool and Single Track Formation in Selective Laser Sintering/Selective Laser Melting , 2014 .

[17]  L. Xing,et al.  Laser welding of Zr45Cu48Al7 bulk glassy alloy , 2006 .

[18]  Silvia Vock,et al.  Powders for powder bed fusion: a review , 2019, Progress in Additive Manufacturing.

[19]  Joshua A. Tarbutton,et al.  Positioning control effectiveness of optical knife edge displacement sensor-embedded monolithic precision stage , 2015 .

[20]  Frank J. Margetan,et al.  Bruce Thompson: Adventures and advances in ultrasonic backscatter , 2012 .

[21]  Jeffrey Malcolm Benson,et al.  The need for powder characterisation in the additive manufacturing industry and the establishment of a national facility , 2015 .

[22]  Yves Bellouard,et al.  On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited] , 2011 .

[23]  Richard W Bowman,et al.  A one-piece 3D printed flexure translation stage for open-source microscopy. , 2015, The Review of scientific instruments.

[24]  Stuart T. Smith,et al.  Flexures: Elements of Elastic Mechanisms , 2000 .

[25]  Reymond Clavel,et al.  Thermal Behavior of an Ultra High-Precision Linear Axis Operating in Industrial Environment , 2008 .

[26]  Brian J. Eves,et al.  Design of a large measurement-volume metrological atomic force microscope (AFM) , 2009 .

[27]  T. Shi,et al.  Laser Welding of Zr41Ti14Cu12Ni10Be23 Bulk Metallic Glass: Experiment and Temperature Field Simulation , 2013 .

[28]  Abolfazl Zolfaghari,et al.  A novel sensor for two-degree-of-freedom motion measurement of linear nanopositioning stage using knife edge displacement sensing technique. , 2017, The Review of scientific instruments.

[29]  G. Kretsis,et al.  A review of the tensile, compressive, flexural and shear properties of hybrid fibre-reinforced plastics , 1987 .

[30]  Jun Ni,et al.  Thermal error modelling for real-time error compensation , 1996 .

[31]  Yunjie Wu,et al.  A control method to make LQR robust: A planes cluster approaching mode , 2014 .

[32]  T. Masumoto,et al.  New Amorphous Ferromagnets with Low Coercive Force , 1975 .

[33]  D. J. Johnson,et al.  Longitudinal compressive behaviour and microstructure of PAN-based carbon fibres , 2001 .

[34]  David J Beebe,et al.  Micromilling: a method for ultra-rapid prototyping of plastic microfluidic devices. , 2015, Lab on a chip.

[35]  Zeeshan Qaiser,et al.  Design of a bioinspired tunable stiffness robotic foot , 2017 .

[36]  Weibin Rong,et al.  A silicon integrated micro nano-positioning XY-stage for nano-manipulation , 2008 .

[37]  Joshua A. Tarbutton,et al.  Compliance and control characteristics of an additive manufactured-flexure stage. , 2015, The Review of scientific instruments.

[38]  Khurram Altaf,et al.  Prototype production and experimental analysis for circular and profiled conformal cooling channels in aluminium filled epoxy injection mould tools , 2013 .

[40]  Olaf Diegel,et al.  Wohlers Report 2018: 3D printing and additive manufacturing state of the industry: Annual Worldwide Progress Report , 2017 .

[41]  A. Granato,et al.  Theory of Mechanical Damping Due to Dislocations , 1956 .

[42]  G. Tapia,et al.  A Review on Process Monitoring and Control in Metal-Based Additive Manufacturing , 2014 .

[43]  Bijan Shirinzadeh,et al.  Design and analysis of a compact flexure-based precision pure rotation stage without actuator redundancy , 2016 .

[44]  Frank W. Liou,et al.  Vision-based defect detection in laser metal deposition process , 2014 .

[45]  S. Pannala,et al.  The metallurgy and processing science of metal additive manufacturing , 2016 .

[46]  Ning Tan,et al.  Calibration of Nanopositioning Stages , 2015, Micromachines.

[47]  C. Kamath,et al.  Laser powder bed fusion additive manufacturing of metals; physics, computational, and materials challenges , 2015 .

[48]  Ehsan Toyserkani,et al.  An image-based feature tracking algorithm for real-time measurement of clad height , 2007, Machine Vision and Applications.

[49]  M. Peltz,et al.  Characterization of Metal Powders Used for Additive Manufacturing , 2014, Journal of research of the National Institute of Standards and Technology.

[50]  Kazunori Hoshino,et al.  Metal additive manufacturing for microelectromechanical systems: Titanium alloy (Ti-6Al-4V)-based nanopositioning flexure fabricated by electron beam melting☆ , 2016 .

[51]  Tianxiang Li,et al.  Removal of Ceramic Defects From a Superalloy Powder Using Triboelectric Processing , 2000 .

[52]  Brent Stucker,et al.  Analysis of defect generation in Ti–6Al–4V parts made using powder bed fusion additive manufacturing processes , 2014 .

[53]  Karl Iagnemma,et al.  Design and Analysis of a Robust, Low-cost, Highly Articulated manipulator enabled by jamming of granular media , 2012, 2012 IEEE International Conference on Robotics and Automation.

[54]  S. Katayama,et al.  High-power fiber laser welding and its application to metallic glass Zr55Al10Ni5Cu30 , 2008 .

[55]  T. Mower,et al.  Mechanical behavior of additive manufactured, powder-bed laser-fused materials , 2016 .

[56]  Ning Tan,et al.  Calibration of single-axis nanopositioning cell subjected to thermal disturbance , 2013, 2013 IEEE International Conference on Robotics and Automation.

[57]  Murti V. Salapaka,et al.  High bandwidth nano-positioner: A robust control approach , 2002 .

[58]  Shorya Awtar,et al.  Physical and Control System Design Challenges in Large Range Nanopositioning , 2010 .

[59]  Thomas Hess,et al.  Process monitoring of additive manufacturing by using optical tomography , 2015 .

[60]  Y. Nakagawa,et al.  Amorphous Ferromagnetic Fe-P-B Alloys Prepared by a New Technique of Splat Cooling , 1971 .

[61]  Valmik Bhavar,et al.  A review on powder bed fusion technology of metal additive manufacturing , 2017 .

[62]  Ruth D. Goodridge,et al.  Powder bed fusion of polymers , 2017 .

[63]  Fereidoon Delfanian,et al.  Phased Array Ultrasonic Technique Parametric Evaluation for Composite Materials , 2014 .

[64]  I. Davies,et al.  THE EFFECT OF PARTIAL SUBSTITUTION OF E-GLASS FIBRE FOR CARBON FIBRE ON THE MECHANICAL PROPERTIES OF CFRP COMPOSITES , 2009 .

[65]  Robert McIntyre Fowler.  Investigation of Compliant Space Mechanisms with Application to the Design of a Large-Displacement Monolithic Compliant Rotational Hinge , 2012 .

[66]  Fereidoon Delfanian,et al.  Wireless Eddy Current System Prototype for Nondestructive Testing , 2013 .

[67]  Shorya Awtar,et al.  Characteristics of Beam-Based Flexure Modules , 2007 .

[68]  K. Wang,et al.  Stiffness‐Controlled Thermoresponsive Hydrogels for Cell Harvesting with Sustained Mechanical Memory , 2017, Advanced healthcare materials.

[69]  Joshua A. Tarbutton,et al.  Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages , 2017 .

[70]  Philip J. Withers,et al.  The Effectiveness of Hot Isostatic Pressing for Closing Porosity in Titanium Parts Manufactured by Selective Electron Beam Melting , 2016, Metallurgical and Materials Transactions A.

[71]  Larry L. Howell,et al.  Handbook of Compliant Mechanisms: Howell/Handbook , 2013 .

[72]  Qingsong Xu,et al.  Design and Testing of a Flexure-Based Constant-Force Stage for Biological Cell Micromanipulation , 2018, IEEE Transactions on Automation Science and Engineering.

[73]  Peng Yan,et al.  Design of a flexure-based XY positioning stage with balanced axial forces on decoupling modules , 2016, 2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO).

[74]  Kira Barton,et al.  Large dynamic range nanopositioning using iterative learning control , 2014 .

[75]  Frank W. Liou,et al.  Development of low‐cost imaging system for laser metal deposition processes , 2011 .

[76]  William E. Frazier,et al.  Metal Additive Manufacturing: A Review , 2014, Journal of Materials Engineering and Performance.

[77]  Wei Qingsong,et al.  Effect of molten pool boundaries on the mechanical properties of selective laser melting parts , 2014 .

[78]  David W. Rosen,et al.  Design for Additive Manufacturing , 2015, Additive Manufacturing Technologies.

[79]  Joshua A. Tarbutton,et al.  Cross-coupling effect of large range XY nanopositioning stage fabricated by stereolithography process , 2016 .

[80]  Charlie C. L. Wang,et al.  The status, challenges, and future of additive manufacturing in engineering , 2015, Comput. Aided Des..

[81]  Mina Aliakbari,et al.  Additive Manufacturing: State-of-the-Art, Capabilities, and Sample Applications with Cost Analysis , 2012 .

[82]  ChaBum Lee,et al.  Long-Range Nano-Scanning Devices Based on Optical Sensing Technology , 2017 .

[83]  A. Elwany,et al.  Pressure-fed mechanism to compensate for motions and dynamic characteristics of compliant nanopositioning stages , 2020 .

[84]  Seung Ki Moon,et al.  Application of 3D printing technology for designing light-weight unmanned aerial vehicle wing structures , 2014, International Journal of Precision Engineering and Manufacturing-Green Technology.

[85]  Alain Delchambre,et al.  Flexible Medical Devices: Review of Controllable Stiffness Solutions , 2017 .

[86]  Anton du Plessis,et al.  Application of microCT to the non-destructive testing of an additive manufactured titanium component , 2015 .

[87]  Li Wang,et al.  Fabrication, Experiments, and Analysis of an LBM Additive-Manufactured Flexure Parallel Mechanism , 2018, Micromachines.

[88]  F. Walther,et al.  Computed tomography for characterization of fatigue performance of selective laser melted parts , 2015 .

[89]  J. Shen,et al.  Laser welding of Ti40Zr25Ni3Cu12Be20 bulk metallic glass , 2012 .

[90]  John A. Slotwinski,et al.  Additive manufacturing: Overview and NDE challenges , 2014 .

[91]  M Maarten Steinbuch,et al.  Design of a long stroke translation stage for AFM , 2010 .

[92]  Larry L. Howell,et al.  Handbook of compliant mechanisms , 2013 .

[93]  A. Inoue,et al.  Mechanical Properties and Thermal Stability of (Fe, Co, Ni)-M-B (M=IV, V and VI Group Transition Metals) Amorphous Alloys with Low Boron Concentration , 1980 .

[94]  P. Duwez,et al.  Amorphous Ferromagnetic Phase in Iron‐Carbon‐Phosphorus Alloys , 1967 .

[95]  T. Shi,et al.  Laser welding of annealed Zr55Cu30Ni5Al10 bulk metallic glass , 2014 .

[96]  Akira Hosokawa,et al.  Monitoring of Laser Consolidation Process of Metal Powder with High Speed Video Camera , 2012 .

[97]  Hiroshi Matsuhisa,et al.  Semi-active vibration isolation system with variable stiffness and damping control , 2008 .

[98]  David L. Bourell,et al.  Property evaluation of 304L stainless steel fabricated by selective laser melting , 2012 .

[99]  H. Maier,et al.  On the mechanical behaviour of titanium alloy TiAl6V4 manufactured by selective laser melting: Fatigue resistance and crack growth performance , 2013 .

[100]  Ian J. Davies,et al.  Flexural properties of glass and carbon fiber reinforced epoxy hybrid composites , 2013 .

[101]  J. Rudlin,et al.  Inspection of additive-manufactured layered components. , 2015, Ultrasonics.

[102]  Hossein Taheri,et al.  Powder-based additive manufacturing – a review of types of defects, generation mechanisms, detection, property evaluation and metrology , 2017 .

[103]  Shawn P. Moylan,et al.  Measurement Science Needs for Real-time Control of Additive Manufacturing Powder Bed Fusion Processes , 2015 .

[104]  Yusheng Shi,et al.  Differences in microstructure and properties between selective laser melting and traditional manufacturing for fabrication of metal parts: A review , 2015, Frontiers of Mechanical Engineering.

[105]  Jack Beuth,et al.  Integrated melt pool and microstructure control for Ti–6Al–4V thin wall additive manufacturing , 2015 .

[106]  Carl Sommer,et al.  Complete EDM Handbook , 2005 .

[107]  A. Jarfors,et al.  Porosity formation and gas bubble retention in laser metal deposition , 2009 .

[108]  H. Hamada,et al.  Effects of Reinforcing Fibre Properties on Various Mechanical Behaviors of Unidirectional Carbon/Epoxy Laminates , 1996 .

[109]  D. StJohn,et al.  Microstructure and Mechanical Properties of Long Ti-6Al-4V Rods Additively Manufactured by Selective Electron Beam Melting Out of a Deep Powder Bed and the Effect of Subsequent Hot Isostatic Pressing , 2015, Metallurgical and Materials Transactions A.

[110]  C. Brice,et al.  Precipitation behavior of aluminum alloy 2139 fabricated using additive manufacturing , 2015 .

[111]  S. Sun,et al.  The Effect of Manufacturing Defects on the Fatigue Behaviour of Ti-6Al-4V Specimens Fabricated Using Selective Laser Melting , 2014 .

[112]  Seung Ki Moon,et al.  Process monitoring and inspection systems in metal additive manufacturing: Status and applications , 2017 .

[113]  Hyun-Jong Kim,et al.  Effect of powder size on the consolidation of gas atomized Cu54Ni6Zr22Ti18 amorphous powders , 2006 .

[114]  Stuart T. Smith,et al.  Dimensional metrology with X-ray CT: A comparison with CMM measurements on internal features and compliant structures , 2018 .

[115]  Xibing Gong,et al.  Beam speed effects on Ti–6Al–4V microstructures in electron beam additive manufacturing , 2014 .