Simultaneous Design of Positive Acceleration Velocity and Position Feedback Based Combined Damping and Tracking Control Scheme for Nanopositioners

Positive acceleration, velocity and position feedback (PAVPF) control scheme has been successfully applied to piezoelectrically actuated nanopositioning systems to suppress resonance impelled vibrations. This control design shows a couple of improvements like high bandwidth control. The design framework is based on the principle in which damping is imparted by shifting the closed loop poles arbitrarily further into the left-half plane. In the proposed control design, a polynomial based pole placement approach was used to simultaneously damp and track the closed-loop poles to achieve a larger bandwidth control and reduced tracking error than the traditional PAVPF implementation as shown by experimental results.