Four-leg independent mechanism for MEMS microrobot

In this paper, the development of a quadruped micro-electro mechanical system (MEMS) microrobot with a four-leg independent mechanism is described. As the actuator mechanism inside small robot bodies is difficult to realize, many microrobots use external field forces such as magnetism and vibration. In this paper, artificial muscle wires that are family of shape memory alloy are used for the force of the actuator. The artificial muscle wire shows the large displacement by passing the electrical current through the material itself. The double four-link mechanism is adopted for the leg system. The link mechanism transforms the linear motion of the artificial muscle wire to the foot step-like pedaling motion. The location of the backward swing motion is lower than that of forward swing motion. This motion generates the locomotion force. As a result, the total length of the constructed quadruped MEMS microrobot was 6 mm. The microrobot could perform similar gait pattern changes as the quadruped animal.

[1]  Ken Saito,et al.  SMA actuator and pulse-type hardware neural networks IC for fast walking motion of insect-type MEMS microrobot , 2016, 2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM).

[2]  Ken Saito,et al.  Biomimetics Micro Robot with Active Hardware Neural Networks Locomotion Control and Insect-Like Switching Behaviour , 2012 .

[3]  Bruce Randall Donald,et al.  An Untethered, Electrostatic, Globally Controllable , 2006 .

[4]  Javaid Iqbal,et al.  On the Improvement of Multi-Legged Locomotion over Difficult Terrains Using a Balance Stabilization Method: , 2012 .

[5]  Ken Saito,et al.  Hexapod Type Microrobot Controlled by Power Type IC of Artificial Neural Networks , 2015 .

[6]  Ken Saito,et al.  Gait pattern changing of quadruped robot using pulse-type hardware neural networks , 2017, Artificial Life and Robotics.

[7]  Yu-Chong Tai,et al.  Integrated movable micromechanical structures for sensors and actuators , 1988 .

[8]  K. J. Gabriel,et al.  Micro gears and turbines etched from silicon , 1987 .

[9]  Mohiuddin Ahmed,et al.  Walking Hexapod Robot in Disaster Recovery: Developing Algorithm for Terrain Negotiation and Navigation , 2010 .

[10]  Dana E. Vogtmann,et al.  A 25 MG magnetically actuated microrobot walking at > 5 body lengths/sec , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[11]  Mingjing Qi,et al.  A fast-moving electrostatic crawling insect , 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

[12]  William C. Tang,et al.  Laterally driven polysilicon resonant microstructures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[13]  Ken Saito,et al.  Development of a pulse control-type MEMS microrobot with a hardware neural network , 2011, Artificial Life and Robotics.

[14]  Robert J. Wood,et al.  Biologically-inspired locomotion of a 2g hexapod robot , 2010, 2010 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[15]  Ken Saito,et al.  Piezo impact type MEMS rotary actuator and application to millimeter size AI controlled robot , 2013, 2013 IEEE International Ultrasonics Symposium (IUS).

[16]  Paolo Corradi,et al.  Evaluation of building technology for mass producible millimetre-sized robots using flexible printed circuit boards , 2009 .

[17]  Ken Saito,et al.  Hexapod Type MEMS Microrobot Equipped with an Artificial Neural Networks IC , 2017, J. Robotics Netw. Artif. Life.