Design of topologically optimal microgripper

This paper presents a topological-optimization method which applies the theory of ground structure parameterization to design and analyzes a microgripper device. The study defines the compliant design domain as 2000 mum times 2000 mum with a 200 mum thickness, and discusses the effect of different optimization parameters. The driver is an electro-thermal microactuator that can actuate approximately 6000 muN of output force to the displacement amplifier. The microgripper tip deflects up to 18 mum when 1.5 V is applied.

[1]  Sridhar Kota,et al.  An Energy Formulation for Parametric Size and Shape Optimization of Compliant Mechanisms , 1999 .

[2]  Koji Ikuta,et al.  Micro/miniature shape memory alloy actuator , 1990, Proceedings., IEEE International Conference on Robotics and Automation.

[3]  K. Gupta,et al.  Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[4]  G. K. Ananthasuresh,et al.  On an optimal property of compliant topologies , 2000 .

[5]  L.P. Lee,et al.  Polymer MEMS-based microgripper for single cell manipulation , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[6]  W. Nogimori,et al.  A laser-powered micro-gripper , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[7]  Manfred Kohl,et al.  SMA microgripper system , 2002 .

[8]  Noboru Kikuchi,et al.  TOPOLOGY OPTIMIZATION OF COMPLIANT MECHANISMS USING THE HOMOGENIZATION METHOD , 1998 .

[9]  K. Nakamura,et al.  A piezoelectric micromotor using in-plane shearing of PZT elements , 2004, IEEE/ASME Transactions on Mechatronics.

[10]  Kristofer S. J. Pister,et al.  Analysis of closed-loop control of parallel-plate electrostatic microgrippers , 1994, Proceedings of the 1994 IEEE International Conference on Robotics and Automation.

[11]  William H. Grover,et al.  Development and evaluation of a microdevice for amino acid biomarker detection and analysis on Mars. , 2005, Proceedings of the National Academy of Sciences of the United States of America.

[12]  Arthur C. Sanderson,et al.  Micropeg manipulation with a compliant microgripper , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).

[13]  H. Fujita,et al.  An electrostatic 2-dimensional micro-gripper for nano structure , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[14]  Shinji Nishiwaki,et al.  Design of flextensional transducers using homogenization design method , 1999, Smart Structures.

[15]  Noboru Kikuchi,et al.  Design of piezoelectric transducers using topology optimization , 1999 .