Robust controller design for RTP system using structured uncertainty approach
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Hong Bae Park | Jong Hae Kim | Do Chang Oh | Sang Kyung Lee | Jong Hae Kim | H. Park | Sang Kyung Lee | Dochang Oh
[1] H. A. Lord. Thermal and stress analysis of semiconductor wafers in a rapid thermal processing oven , 1988 .
[2] S. Hu. Temperature Distribution and Stresses in Circular Wafers in a Row During Radiative Cooling , 1969 .
[3] R.L. Kosut,et al. Finite-time tracking with actuator saturation: application to RTP temperature trajectory following , 1994, Proceedings of 1994 33rd IEEE Conference on Decision and Control.
[4] Bruce A. Francis,et al. Feedback Control Theory , 1992 .
[5] C. Hill,et al. Rapid Thermal Annealing - Theory and Practice , 1989 .
[6] John C. Doyle. Analysis of Feedback Systems with Structured Uncertainty , 1982 .
[7] Keith Glover,et al. Robust control design using normal-ized coprime factor plant descriptions , 1989 .
[8] John Doyle,et al. Structured uncertainty in control system design , 1985, 1985 24th IEEE Conference on Decision and Control.
[9] C. F. Elia,et al. RTP multivariable temperature controller development , 1994, Proceedings of 1994 American Control Conference - ACC '94.
[10] Andrew Packard,et al. The complex structured singular value , 1993, Autom..
[11] Stephen P. Boyd,et al. Improving static performance robustness of thermal processes , 1994, Proceedings of 1994 33rd IEEE Conference on Decision and Control.
[12] K. Glover,et al. State-space formulae for all stabilizing controllers that satisfy an H(infinity)-norm bound and relations to risk sensitivity , 1988 .