Capillary Gripping and Self-Alignment: A Route Toward Autonomous Heterogeneous Assembly

We present a pick-and-place approach driven by capillarity for highly precise and cost-effective assembly of mesoscopic components onto structured substrates. Based on competing liquid bridges, the technology seamlessly combines programmable capillary grasping, handling, and passive releasing with capillary self-alignment of components onto prepatterned assembly sites. The performance of the capillary gripper is illustrated by comparing the measured lifting capillary forces with those predicted by a hydrostatic model of the liquid meniscus. Two component release strategies, based on either axial or shear capillary forces, are discussed and experimentally validated. The release-and-assembly process developed for a continuously moving assembly substrate provides a roll-to-roll-compatible technology for high-resolution and high-throughput component assembly.

[1]  Jaehoon Chung,et al.  Programmable reconfigurable self-assembly: parallel heterogeneous integration of chip-scale components on planar and nonplanar surfaces , 2006, Journal of Microelectromechanical Systems.

[2]  Andreas Dietzel,et al.  Dynamics of capillary self-alignment for mesoscopic foil devices , 2013 .

[3]  Michaël Gauthier,et al.  Principle of a Submerged Freeze Gripper for Microassembly , 2008, IEEE Transactions on Robotics.

[4]  Huajian Gao,et al.  Scaling effects of wet adhesion in biological attachment systems. , 2006, Acta biomaterialia.

[5]  Tsu-Jae King Liu,et al.  Technologies for Cofabricating MEMS and Electronics , 2008, Proceedings of the IEEE.

[6]  Pierre Lambert,et al.  In-plane mode dynamics of capillary self-alignment. , 2014, Langmuir : the ACS journal of surfaces and colloids.

[7]  Alain Delchambre,et al.  Non-contact handling in microassembly: Acoustical levitation , 2005 .

[8]  Gualtiero Fantoni,et al.  A Critical Review of Releasing Strategies in Microparts Handling , 2008, IPAS.

[9]  Quan Zhou,et al.  Evaluation of adhesion forces between arbitrary objects for micromanipulation , 2006 .

[10]  Bharat Bhushan,et al.  Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction , 2003 .

[11]  Hermann Sandmaier,et al.  Fluidassem - A New Method of Fluidic-Based Assembly with Surface Tension , 2008, IPAS.

[12]  C. Bark,et al.  Gripping with low viscosity fluids , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[13]  Shigeki Saito,et al.  A scheme for micro-manipulation based on capillary force , 2004, Journal of Fluid Mechanics.

[14]  L. Roselli,et al.  Low-cost assembly of UHF RFID chips and flexible substrate antennas by magnetic coupling approach , 2010, 2010 IEEE MTT-S International Microwave Symposium.

[15]  Darwin G. Caldwell,et al.  A Bernoulli principle gripper for handling of planar and 3D (food) products , 2010, Ind. Robot.

[16]  Ohmi Fuchiwaki,et al.  Development of wet tweezers based on capillary force for complex-shaped and heterogeneous micro-assembly , 2013, 2013 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[17]  Jacques Jacot,et al.  A case study of surface tension gripping: the watch bearing , 2006 .

[18]  Frank Niklaus,et al.  Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[19]  I. Fassi,et al.  Development of a gripping system based on capillary force , 2005, (ISATP 2005). The 6th IEEE International Symposium on Assembly and Task Planning: From Nano to Macro Assembly and Manufacturing, 2005..

[20]  Alain Delchambre,et al.  Parameters ruling capillary forces at the submillimetric scale. , 2005, Langmuir : the ACS journal of surfaces and colloids.

[21]  Fumihito Arai,et al.  Synchronized laser micromanipulation of microtools for assembly of microbeads and indirect manipulation of microbe , 2003, Proceedings 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) (Cat. No.03CH37453).

[22]  Yewang Su,et al.  Effects of contact shape on biological wet adhesion , 2007 .

[23]  Andreas Dietzel,et al.  Foil-to-Foil System Integration Through Capillary Self-Alignment Directed by Laser Patterning , 2015, Journal of Microelectromechanical Systems.

[24]  J. Eggers Nonlinear dynamics and breakup of free-surface flows , 1997 .

[25]  Gualtiero Fantoni,et al.  A new capillary gripper for mini and micro parts , 2013 .

[26]  Jiang Zhe,et al.  A Capillary Microgripper based on Electrowetting , 2008 .

[27]  Andreas Dietzel,et al.  Capillary self-alignment of mesoscopic foil components for sensor-systems-in-foil , 2012 .

[28]  Quan Zhou,et al.  Hybrid microhandling: a unified view of robotic handling and self-assembly , 2008 .

[29]  G. Fantoni,,et al.  Design of a Novel Electrostatic Gripper , 2004 .

[30]  Futoshi Iwata,et al.  Miniature robot with micro capillary capturing probe , 1995, MHS'95. Proceedings of the Sixth International Symposium on Micro Machine and Human Science.

[31]  Lida Xu,et al.  The internet of things: a survey , 2014, Information Systems Frontiers.

[32]  Dominiek Reynaerts,et al.  Assembly of Microsystems , 2000 .