Robust measurement of the diffuse surface by phase shift profilometry

As one of the most popular non-contact shape measurement methods, phase shift profilometry has been studied for many decades and has found applications in both the scientific and industrial world. However, its measurement accuracy and noise resistance ability are still widely researched topics. In this paper, a method to determine the phase map by calculating the phases from multiple high carrier frequencies is proposed for phase shift profilometry to measure the object's shape. Four-shifted phases are well designed to yield a closed-form solution, and a combination of the computation results from multiple high frequencies can suppress the prevalent noise effectively. Calibration methods are also introduced for practical implementation. A moving kernel filter calculated from the maximum likelihood estimation is used to suppress the noise further. The experimental results verified the effectiveness of the proposed methods.

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