Recent advances in gas phase microcantilever-based sensing

Abstract Microcantilever (MC) sensors have become a more attractive technique for gas phase sensing during recent years. The purpose of this review is to critically summarize the recent advances in terms of theory, detection and sensing scheme, sensor design, and applications of MC-based gas sensors, with most of the related work reported since 2005.

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[59]  Pengcheng Xu,et al.  Self-assembly and sensing-group graft of pre-modified CNTs on resonant micro-cantilevers for specific detection of volatile organic compound vapors , 2010 .

[60]  Isabelle Dufour,et al.  Zeolite-modified cantilevers for the sensing of nitrotoluene vapors , 2009 .

[61]  Chengkuo Lee,et al.  Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability , 2012 .

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[64]  Panos G. Datskos,et al.  Analyte species and concentration identification using differentially functionalized microcantilever arrays and artificial neural networks , 2006 .

[65]  Qing Zhu,et al.  Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection. , 2008, Applied physics letters.

[66]  Xinxin Li,et al.  A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals , 2006 .

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[68]  Deflection and Resonance Frequency Shift of a Microcantilever Induced by Chemisorption: Oxygen on Si(100) , 2012 .

[69]  Apparao M. Rao,et al.  Using electric actuation and detection of oscillations in microcantilevers for pressure measurements , 2008 .

[70]  Xiaoyuan Xia,et al.  Resonance-mode effect on microcantilever mass-sensing performance in air. , 2008, The Review of scientific instruments.

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[72]  F. Josse,et al.  Theoretical Analysis of Strong-Axis Bending Mode Vibrations for Resonant Microcantilever (Bio)Chemical Sensors in Gas or Liquid Phase , 2007, Journal of Microelectromechanical Systems.

[73]  Xinxin Li,et al.  Prefer-oriented Cu 2 O Micro-crystals: SAM Templated Growth and DMMP-vapor Detection: Prefer-oriented Cu 2 O Micro-crystals: SAM Templated Growth and DMMP-vapor Detection , 2011 .

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[75]  M. Allendorf,et al.  MOF @ MEMS: Design optimization for high sensitivity chemical detection , 2012 .

[76]  Yael Nemirovsky,et al.  Composite porous silicon-crystalline silicon cantilevers for enhanced biosensing , 2008 .

[77]  S. Jeon,et al.  Gravimetric analysis of the adsorption and desorption of CO2 on amine-functionalized mesoporous silica mounted on a microcantilever array. , 2011, Environmental science & technology.

[78]  J. Colton,et al.  Microcantilevers: sensing chemical interactions via mechanical motion. , 2008, Chemical reviews.

[79]  Kun-Hong Lee,et al.  Microcantilevers with nanowells as moisture sensors , 2009 .

[80]  J. Lock,et al.  Trace detection of peroxides using a microcantilever detector , 2009 .

[81]  Damping Models for Microcantilevers, Bridges, and Torsional Resonators in the Free-Molecular-Flow Regime , 2008, Journal of Microelectromechanical Systems.

[82]  K. Varahramyan,et al.  Moisture measurement using porous aluminum oxide coated microcantilevers , 2008 .

[83]  Ian J Burgess,et al.  Microcantilever-based sensors: effect of morphology, adhesion, and cleanliness of the sensing surface on surface stress. , 2007, Analytical chemistry.

[84]  J. Matovic,et al.  A new approach to IR bimaterial detectors theory , 2007 .

[85]  Min Liu,et al.  Silicon dioxide microcantilever with piezoresistive element integrated for portable ultraresoluble gaseous detection , 2006 .

[86]  T. Porter,et al.  Sensing Materials for the Detection of Chlorine Gas Using Embedded Piezoresistive Microcantilever Sensors , 2008 .

[87]  Haitao Yu,et al.  Bianalyte mass detection with a single resonant microcantilever , 2009 .

[88]  S. Elliott,et al.  Breath analysis system based on phase-shifting interferometric microscopy readout of microcantilever arrays , 2011, Journal of breath research.

[89]  Juzheng Huang,et al.  Sensor Array Composed of “Clicked” Individual Microcantilever Chips , 2011 .

[90]  Thomas Thundat,et al.  Simulation of adsorption-induced stress of a microcantilever sensor , 2005 .

[91]  Eric Bourillot,et al.  Detection of gas trace of hydrofluoric acid using microcantilever , 2004 .

[92]  Zheng You,et al.  Characterization of the gas sensors based on polymer-coated resonant microcantilevers for the detection of volatile organic compounds. , 2010, Analytica chimica acta.

[93]  V Seena,et al.  Polymer nanocomposite nanomechanical cantilever sensors: material characterization, device development and application in explosive vapour detection , 2011, Nanotechnology.

[94]  R. Maeda,et al.  Design, Fabrication, and Evaluation of Highly Sensitive Compact Chemical Sensor System Employing a Microcantilever Array and a Preconcentrator , 2011 .

[95]  C. Ziegler,et al.  A new cantilever system for gas and liquid sensing. , 2003, Ultramicroscopy.

[96]  Haitao Yu,et al.  Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers , 2012, IEEE Transactions on Industrial Electronics.

[97]  Chongdu Cho,et al.  A conduction–convection model for self-heating in piezoresistive microcantilever biosensors , 2012 .

[98]  Hui Xie,et al.  Enhanced sensitivity of mass detection using the first torsional mode of microcantilevers , 2007, 2007 International Conference on Mechatronics and Automation.

[99]  Donald J. Sirbuly,et al.  Detection and discrimination of pure gases and binary mixtures using a dual-modality microcantilever sensor , 2010 .

[100]  Huiling Duan,et al.  Surface stress induced by interactions of adsorbates and its effect on deformation and frequency of microcantilever sensors , 2009 .

[101]  Koichi Matsushita,et al.  Hydrogen Gas Sensing Using a Pd-Coated Cantilever , 2000 .

[102]  Panos G. Datskos,et al.  Response Signatures for Nanostructured, Optically-Probed, Functionalized Microcantilever Sensing Arrays , 2004 .

[103]  Todd Sulchek,et al.  Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever , 2003 .

[104]  Zhou Long,et al.  Differentially ligand-functionalized microcantilever arrays for metal ion identification and sensing. , 2007, Analytical chemistry.

[105]  V. Ostanin,et al.  Simultaneous readout of multiple microcantilever arrays with phase-shifting interferometric microscopy. , 2009, The Review of scientific instruments.

[106]  G. Fedder,et al.  Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons , 2005, IEEE Sensors Journal.

[107]  Gregory P. Nordin,et al.  Use of thermally induced higher order modes of a microcantilever for mercury vapor detection , 2006 .

[108]  Sangmin Jeon,et al.  Detection of formaldehyde vapor using mercaptophenol-coated piezoresistive cantilevers , 2007 .

[109]  Adam H Love,et al.  Chemical vapor discrimination using a compact and low-power array of piezoresistive microcantilevers. , 2008, The Analyst.

[110]  张晓晶 Zhang Xiaojing,et al.  Design and Fabrication of Micro-Cantilever Beam Fiber Bragg Grating Hydrogen Sensor Based on Coated-Palladium Film , 2010 .