Simultaneous Displacement/Force Self-Sensing in Piezoelectric Actuators and Applications to Robust Control

Self-sensing technique consists of using an actuator as a sensor at the same time. This is possible for most actuators with physically reversible principle such as piezoelectric materials. The main advantages of self-sensing are: 1) the embeddability of the measurement technique, and 2) its low cost as no additional sensor is required. This paper presents a self-sensing technique for piezoelectric actuators used in precise positioning applications like micromanipulation and microassembly. The main novelty is that both displacement and force signals can be simultaneously estimated. This allows a feedback control using one of these two signals with a display of the other signal. To demonstrate this advantage, a robust H∞ feedback control on displacement with real-time display of the force is used as an application of the proposed self-sensing technique. In this paper, experimental results obtained with a piezoelectric cantilever actuator validate and demonstrate the efficiency of the proposed self-sensing.

[1]  Ephrahim Garcia,et al.  A Self-Sensing Piezoelectric Actuator for Collocated Control , 1992 .

[2]  Aristides A. G. Requicha,et al.  Compensation of Scanner Creep and Hysteresis for AFM Nanomanipulation , 2008, IEEE Transactions on Automation Science and Engineering.

[3]  D. Croft,et al.  Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application , 2000, Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334).

[4]  A. Fleming,et al.  A grounded-load charge amplifier for reducing hysteresis in piezoelectric tube scanners , 2005 .

[5]  Saeid Bashash,et al.  A Polynomial-Based Linear Mapping Strategy for Feedforward Compensation of Hysteresis in Piezoelectric Actuators , 2008 .

[6]  Takeshi Morita,et al.  Improvement of Self-sensing Piezoelectric Actuator Control Using Permittivity Change Detection , 2010 .

[7]  P. Khargonekar,et al.  State-space solutions to standard H2 and H∞ control problems , 1988, 1988 American Control Conference.

[8]  Micky Rakotondrabe,et al.  Bouc–Wen Modeling and Inverse Multiplicative Structure to Compensate Hysteresis Nonlinearity in Piezoelectric Actuators , 2011, IEEE Transactions on Automation Science and Engineering.

[9]  Philippe Lutz,et al.  Complete Open Loop Control of Hysteretic, Creeped, and Oscillating Piezoelectric Cantilevers , 2010, IEEE Transactions on Automation Science and Engineering.

[10]  Micky Rakotondrabe,et al.  Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World , 2010 .

[11]  J.-M. Breguet,et al.  A smart microrobot on chip: design, identification and modeling , 2003, Proceedings 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003).

[12]  Philippe Lutz,et al.  Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators. , 2009, The Review of scientific instruments.

[13]  Gerber,et al.  Atomic Force Microscope , 2020, Definitions.

[14]  Kok Kiong Tan,et al.  Self-Sensing Actuation With Adaptive Control in Applications With Switching Trajectory , 2008, IEEE/ASME Transactions on Mechatronics.

[15]  Santosh Devasia,et al.  A Survey of Control Issues in Nanopositioning , 2007, IEEE Transactions on Control Systems Technology.

[16]  A. Bergander,et al.  Mobile cm3-microrobots with tools for nanoscale imaging and micromanipulation , 2004 .

[17]  Yuguo Cui.  Self-Sensing Compounding Control of Piezoceramic Micro-Motion Worktable Based on Integrator , 2006, 2006 6th World Congress on Intelligent Control and Automation.

[18]  Philippe Lutz,et al.  Quadrilateral Modelling and Robust Control of a Nonlinear Piezoelectric Cantilever , 2009, IEEE Transactions on Control Systems Technology.

[19]  Chibum Lee,et al.  Fast Robust Nanopositioning—A Linear-Matrix-Inequalities-Based Optimal Control Approach , 2009, IEEE/ASME Transactions on Mechatronics.

[20]  Philippe Lutz,et al.  Interval Modeling and Robust Control of Piezoelectric Microactuators , 2012, IEEE Transactions on Control Systems Technology.

[21]  Santosh Devasia,et al.  Inverse-feedforward of charge-controlled piezopositioners , 2008 .

[22]  Philippe Lutz,et al.  Dynamic displacement self-sensing and robust control of cantilever piezoelectric actuators dedicated for microassembly , 2010, 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[23]  A. Dubra,et al.  Preisach classical and nonlinear modeling of hysteresis in piezoceramic deformable mirrors. , 2005, Optics express.

[24]  Philippe Lutz,et al.  Quasistatic displacement self-sensing method for cantilevered piezoelectric actuators. , 2009, The Review of scientific instruments.

[25]  P. Lutz,et al.  Development, Modeling, and Control of a Micro-/Nanopositioning 2-DOF Stick–Slip Device , 2009, IEEE/ASME Transactions on Mechatronics.

[26]  Wei Tech Ang,et al.  Feedforward Controller With Inverse Rate-Dependent Model for Piezoelectric Actuators in Trajectory-Tracking Applications , 2007, IEEE/ASME Transactions on Mechatronics.

[27]  K. Glover,et al.  State-space formulae for all stabilizing controllers that satisfy and H ∞ norm bound and relations to risk sensitivity , 1988 .

[28]  Mamoru Ito,et al.  Application of self-sensing actuator to control of a soft-handling gripper , 1998, Proceedings of the 1998 IEEE International Conference on Control Applications (Cat. No.98CH36104).

[29]  Micky Rakotondrabe,et al.  Presentation, force estimation and control of an instrumented platform dedicated to automated micromanipulation tasks , 2010, 2010 IEEE International Conference on Automation Science and Engineering.

[30]  Santosh Devasia,et al.  Should model-based inverse inputs be used as feedforward under plant uncertainty? , 2002, IEEE Trans. Autom. Control..

[31]  Ken Kundert,et al.  Modeling Dielectric Absorption in Capacitors , 2008 .