Nonvolatile Nanoelectromechanical Memory Switches for Low-Power and High-Speed Field-Programmable Gate Arrays

The application of nanoelectromechanical (NEM) memory switches to field-programmable gate arrays (FPGAs) has been proposed for the first time. NEM memory switches replace MOSFETs and NEM relay switches in connection blocks and switch boxes. The proposed NEM-memory-based FPGAs feature higher speed, lower energy consumption, and smaller chip area than the other FPGAs. In addition, compared with the previously reported NEM-relay-based FPGAs, they show nonvolatile storage of signal paths and stable rail-to-rail signal voltage swing because data signal paths are maintained by adhesion force. In addition, the contact resistance (Rco) of a NEM memory switch is lower than that of a NEM relay switch thanks to larger contact area.

[1]  M. Dunn,et al.  The role of van der Waals forces in adhesion of micromachined surfaces , 2005, Nature materials.

[2]  Sean Eichenlaub,et al.  Hamaker constants in integrated circuit metalization. , 2002, Journal of colloid and interface science.

[3]  Daniel G. Saab,et al.  Single-device “XOR” and “AND” gates for high speed, very low power LSI mechanical processors , 2012 .

[4]  Scott Hauck,et al.  Reconfigurable computing: a survey of systems and software , 2002, CSUR.

[5]  Russell Tessier,et al.  FPGA Architecture: Survey and Challenges , 2008, Found. Trends Electron. Des. Autom..

[6]  Robert L. Jackson,et al.  A Multi-Scale Model for Contact Between Rough Surfaces , 2006 .

[7]  Yeonjoon Park,et al.  Nano-Scale Lateral Milling with Focused Ion Beam for Ultra-Smooth Optical Device Surface~!2009-12-16~!2010-02-18~!2010-04-21~! , 2010 .

[8]  Dominic Vella,et al.  Switch on, switch off: stiction in nanoelectromechanical switches , 2013, Nanotechnology.

[9]  David Choi,et al.  New Non-Volatile Memory Structures for FPGA Architectures , 2008, IEEE Transactions on Very Large Scale Integration (VLSI) Systems.

[10]  R. Howe,et al.  Integration of nanoelectromechanical (NEM) relays with silicon CMOS with functional CMOS-NEM circuit , 2011, 2011 International Electron Devices Meeting.

[11]  Nanning Zheng,et al.  Exploring the Use of Emerging Nonvolatile Memory Technologies in Future FPGAs , 2013, IEEE Transactions on Very Large Scale Integration (VLSI) Systems.

[12]  V. Pott,et al.  The Shuttle Nanoelectromechanical Nonvolatile Memory , 2012, IEEE Transactions on Electron Devices.

[13]  Stefan Björklund,et al.  A finite element-based model of normal contact between rough surfaces , 2003 .

[14]  Lionel Torres,et al.  A non-volatile run-time FPGA using thermally assisted switching MRAMS , 2008, 2008 International Conference on Field Programmable Logic and Applications.

[15]  K. Masu,et al.  A multi-physics simulation technique for integrated MEMS , 2012, 2012 International Electron Devices Meeting.

[16]  A. M. Ionescu,et al.  Self-assembled nano-electro-mechanical tri-state carbon nanotube switches for reconfigurable integrated circuits , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[17]  H.-S. Philip Wong,et al.  Nano-Electro-Mechanical relays for FPGA routing: Experimental demonstration and a design technique , 2012, 2012 Design, Automation & Test in Europe Conference & Exhibition (DATE).

[18]  Daniel G. Saab,et al.  Ultra-low-Power Ultra-fast Hybrid CNEMS-CMOS FPGA , 2010, 2010 International Conference on Field Programmable Logic and Applications.

[19]  Charles G. Smith,et al.  Nanomechanical cantilever arrays for low-power and low-voltage embedded nonvolatile memory applications , 2007, SPIE MOEMS-MEMS.

[20]  Gabriel M. Rebeiz RF MEMS: Theory, Design and Technology , 2003 .

[21]  Francesc Torres,et al.  3-terminal tungsten CMOS-NEM relay , 2014, 2014 10th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME).

[22]  Dinesh Bhatia,et al.  FPGA architecture for standby power management , 2005, Proceedings. 2005 IEEE International Conference on Field-Programmable Technology, 2005..

[23]  Tsu-Jae King Liu,et al.  Recent progress and challenges for relay logic switch technology , 2012, 2012 Symposium on VLSI Technology (VLSIT).

[24]  E. Ng,et al.  A Bistable Electrostatic Silicon Nanofin Relay for Nonvolatile Memory Application , 2013, Journal of Microelectromechanical Systems.