Dynamic displacement self-sensing and robust control of cantilever piezoelectric actuators dedicated for microassembly

The main objective of this paper is the dynamic self-sensing of the motion of piezoelectric actuators. The proposed measurement technique is afterwards used for a closed-loop control. Aiming to obtain a self-sensing scheme that estimates the transient and steady-state modes of the displacement, we extend a previous static self-sensing scheme by adding a dynamic part. Analytical solutions are provided to compute the gains of this dynamic part. Afterwards, the proposed dynamic self-sensing result is used in a closed-loop control. The experimental results demonstrate the concept and evaluate the accuracy and the efficiency of the proposed technique for closed-loop applications.

[1]  Philippe Lutz,et al.  Quasistatic displacement self-sensing method for cantilevered piezoelectric actuators. , 2009, The Review of scientific instruments.

[2]  K. Glover,et al.  State-space formulae for all stabilizing controllers that satisfy and H ∞ norm bound and relations to risk sensitivity , 1988 .

[3]  P. Khargonekar,et al.  State-space solutions to standard H2 and H∞ control problems , 1988, 1988 American Control Conference.

[4]  P. Khargonekar,et al.  STATESPACE SOLUTIONS TO STANDARD 2 H AND H? CONTROL PROBLEMS , 1989 .

[5]  C. Clevy,et al.  Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation , 2005, IEEE/ASME Transactions on Mechatronics.

[6]  Yuguo Cui.  Self-Sensing Compounding Control of Piezoceramic Micro-Motion Worktable Based on Integrator , 2006, 2006 6th World Congress on Intelligent Control and Automation.

[7]  P. Lutz,et al.  Nonlinear modeling and estimation of force in a piezoelectric cantilever , 2007, 2007 IEEE/ASME international conference on advanced intelligent mechatronics.

[8]  P. Khargonekar,et al.  State-space solutions to standard H/sub 2/ and H/sub infinity / control problems , 1989 .

[9]  Philippe Lutz,et al.  Complete Open Loop Control of Hysteretic, Creeped, and Oscillating Piezoelectric Cantilevers , 2010, IEEE Transactions on Automation Science and Engineering.

[10]  S. O. Reza Moheimani,et al.  Control orientated synthesis of high-performance piezoelectric shunt impedances for structural vibration control , 2005, IEEE Transactions on Control Systems Technology.

[11]  Philippe Lutz,et al.  Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators. , 2009, The Review of scientific instruments.

[12]  Kok Kiong Tan,et al.  Self-Sensing Actuation With Adaptive Control in Applications With Switching Trajectory , 2008, IEEE/ASME Transactions on Mechatronics.

[13]  Philippe Lutz,et al.  Modelling and H∞ force control of a nonlinear piezoelectric cantilever , 2007, 2007 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[14]  Mark J. Jackson,et al.  Commercializing Micro-Nanotechnology Products , 2007 .

[15]  Keith Glover,et al.  μ-analysis and synthesis toolbox: for use with Matlab, user’s guide version 3 , 1998 .

[16]  Frank L. Lewis,et al.  Open-loop versus closed-loop control of MEMS devices: choices and issues , 2005 .

[17]  Balas,et al.  [ z-analysis and Synthesis Toolbox * ( p-tools ) t , 2002 .

[18]  Philippe Lutz,et al.  Modelling and Robust Position/Force Control of a Piezoelectric Microgripper , 2007, 2007 IEEE International Conference on Automation Science and Engineering.