μ3: Multiscale, Deterministic Micro-Nano Assembly System for Construction of On-Wafer Microrobots
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[1] Harry E. Stephanou,et al. M3-Modular Multi-Scale Assembly System for MEMS Packaging , 2006, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems.
[2] Harry E. Stephanou,et al. Micro and Meso Scale Robotic Assembly , 2004 .
[3] R. Buser,et al. Tactile microgripper for automated handling of microparts , 1996 .
[4] Ralph L. Hollis,et al. Agile assembly architecture: an agent based approach to modular precision assembly systems , 1997, Proceedings of International Conference on Robotics and Automation.
[5] W. Cleghorn,et al. Microassembly of 3-D microstructures using a compliant, passive microgripper , 2004, Journal of Microelectromechanical Systems.
[6] Dan O. Popa,et al. Micro and Mesoscale Robotic Assembly , 2004 .
[7] Arthur C. Sanderson,et al. Micropeg manipulation with a compliant microgripper , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).
[8] Robert J. Wood,et al. PROTOTYPING MILLIROBOTS USING DEXTROUS MICROASSEMBLY AND FOLDING , 2000 .
[9] Bruce Randall Donald,et al. Sensorless manipulation using massively parallel microfabricated actuator arrays , 1994, Proceedings of the 1994 IEEE International Conference on Robotics and Automation.
[10] Dan O. Popa,et al. Compliant microassembly of MEMS , 2006 .
[11] Fumihito Arai,et al. Adhesion-type micro end effector for micromanipulation , 1997, Proceedings of International Conference on Robotics and Automation.
[12] N. C. MacDonald,et al. DESIGN, FABRICATION, AND CHARACTERIZATION OF SINGLE CRYSTAL SILICON LATCHINGSNAP FASTENERS FOR MICRO ASSEMBLY , 1995 .
[13] Harry E. Stephanou,et al. Tolerance analysis of placement distributions in tethered micro-electro-mechanical systems components , 2004, IEEE International Conference on Robotics and Automation, 2004. Proceedings. ICRA '04. 2004.
[14] Yu Zhou,et al. Fusing force and vision feedback for micromanipulation , 1998, Proceedings. 1998 IEEE International Conference on Robotics and Automation (Cat. No.98CH36146).